PIEZOELECTRIC VALVE AND METHOD FOR MANUFACTURING PIEZOELECTRIC VALVE

Title:

PIEZOELECTRIC VALVE AND METHOD FOR MANUFACTURING PIEZOELECTRIC VALVE

Document Type and Number:

WIPO Patent Application WO/2020/261645

Kind Code:

A1

Abstract:

This piezoelectric valve is provided with: a valve body including a gas pressure chamber which receives compressed gas supplied from the outside; a plate disposed inside the valve body; and an actuator fixed to the plate and disposed inside the valve body together with the plate. The valve body is a case having a front surface that opens. A valve seat, which the gas discharge path and the valve body of the actuator for opening/closing the gas discharge path abut, is provided to the plate. A lid member that closes the opening of the case has a gas discharge opening connected with the gas discharge path of the plate. The gas discharge path of the plate is, at an annular welding part surrounding the gas discharge opening, welded and fixed to the front surface that opens, and is welded and fixed to a leading end surface of the case at an annular welding part in an outer circumferential section.

Inventors:

ITO TAKAFUMI (JP)
MATSUSHITA TADASHI (JP)
HIGUCHI TOSHIRO (JP)
CHEE SZE KEAT (JP)
MIZUNO YOSHINOBU (JP)
HIRATA TOSHITADA (JP)

Application Number:

PCT/JP2020/008392

Publication Date:

December 30, 2020

Filing Date:

February 28, 2020

Export Citation:

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Assignee:

SATAKE ENG CO LTD (JP)
MECHANO TRANSF CORPORATION (JP)

International Classes:

F16K27/02; F16K31/02; H01L41/09; H02N2/04

Foreign References:

JP2013124695A	2013-06-24
JP2016061412A	2016-04-25
JP2003164985A	2003-06-10
JP2013124695A	2013-06-24
JP2017051894A	2017-03-16

Other References: