Title:
PLASMA ASHING FOR COATED DEVICES
Document Type and Number:
WIPO Patent Application WO/2021/087178
Kind Code:
A8
Abstract:
A plasma ashing system includes a plasma generator configured to generate a plasma from a gas source. The system further includes a plasma reaction chamber configured to house a substrate comprising a Parylene coating, wherein the plasma reaction chamber is configured to expose surfaces of the Parylene coating on the substrate to the plasma, wherein the plasma is configured to remove portions of the Parylene coating on the substrate.
Inventors:
CLANCY SEAN (US)
LAWRENCE BENJAMIN (US)
NIEBROSKI ALEXANDER (US)
LAWRENCE BENJAMIN (US)
NIEBROSKI ALEXANDER (US)
Application Number:
PCT/US2020/058068
Publication Date:
December 23, 2021
Filing Date:
October 29, 2020
Export Citation:
Assignee:
HZO INC (US)
International Classes:
B08B7/00; G03F7/36; G03F7/42; H01J37/32; H05K3/22; H05K3/28
Attorney, Agent or Firm:
HOLMAN, Jeffrey (US)
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