PLASMA-CATALYST TYPE SCRUBBER - KOREA MACH & MATERIALS INST

Title:

PLASMA-CATALYST TYPE SCRUBBER

Document Type and Number:

WIPO Patent Application WO/2016/204522

Kind Code:

A1

Abstract:

The present invention relates to a gas post-treatment apparatus for removing pollutants contained in a gas to be treated and, more specifically, to a plasma-catalyst type scrubber for decomposing a non-decomposable process gas (gas to be treated) containing perfluorinated compounds (PFCs) to be generated in a semiconductor manufacturing process or various chemical industries. The plasma-catalyst type scrubber of the present invention comprises: a plasma reaction part for converting discharge gas into thermal energy of a plasma by means of electrical energy, and heating gas to be treated that flows to one side while decomposing the gas to be treated with the thermal energy; and a catalytic reaction part for receiving the gas to be treated, having been heated at the plasma reaction part, and for decomposing, by a catalytic reaction, pollutants contained in the gas to be treated.

Inventors:

LEE DAE-HOON (KR)
SONG YOUNGHOON (KR)
KIM KWAN-TAE (KR)
JO SUNGKWON (KR)
PYUN SUNG HYUN (KR)

Application Number:

PCT/KR2016/006378

Publication Date:

December 22, 2016

Filing Date:

June 15, 2016

Export Citation:

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Assignee:

KOREA MACH & MATERIALS INST (KR)

International Classes:

H01L21/02; B01D47/06; B01D53/32; B01D53/68; B01D53/78; B01D53/86; H01L21/67; H05H1/46

Foreign References:

KR20050102600A	2005-10-26
KR101251155B1	2013-04-05
US20070274888A1	2007-11-29
KR100449781B1	2004-09-22
US20140290919A1	2014-10-02