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Title:
PLASMA GENERATING DEVICE, NEGATIVE ION SOURCE DEVICE, AND MAINTENANCE METHOD FOR PLASMA GENERATING DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/210288
Kind Code:
A1
Abstract:
This plasma generating device comprises: a chamber that generates plasma therein; a plurality of magnets that wrap around the circumference of the chamber; and a magnet retaining part that retains the plurality of magnets. The magnet retaining part includes a plurality of retaining members for retaining the plurality of magnets.

Inventors:
KITAMI HISASHI (JP)
AOKI YASUSHI (JP)
Application Number:
PCT/JP2022/014099
Publication Date:
October 06, 2022
Filing Date:
March 24, 2022
Export Citation:
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Assignee:
SUMITOMO HEAVY INDUSTRIES (JP)
International Classes:
H01J37/08; H01J27/14; H05H1/32
Foreign References:
JP2006049020A2006-02-16
JPH11339673A1999-12-10
JP2015138640A2015-07-30
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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