Title:
PLASMA GENERATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2013/069799
Kind Code:
A1
Abstract:
Provided is a plasma generation device that can suppress arc discharge in which discharge is localized and that produces high temperatures, and that can generate atmospheric-pressure discharge plasma highly efficiently, stably, and without spatial deviation, and at a low temperature of roughly room temperature. The plasma generation device has a plurality of opposing electrodes, wherein provided is a discharge position control means which is disposed between the plurality of electrodes and which is formed with an inverse characteristic material housed in a vessel that is made of a dielectric substance, the inverse characteristic material comprising a fluid that is characterized in that in accordance with a rise in temperature the dielectric constant decreases and that also has polarizability. The inverse characteristic material is spaced apart from the plurality of electrodes.
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Inventors:
MISAWA TATSUYA (JP)
HAYASHI NOBUYA (JP)
HAYASHI NOBUYA (JP)
Application Number:
PCT/JP2012/079297
Publication Date:
May 16, 2013
Filing Date:
November 12, 2012
Export Citation:
Assignee:
UNIV SAGA (JP)
International Classes:
H05H1/24; B01J19/08; H05H1/30; H05H1/46
Foreign References:
| JP2006515708A | 2006-06-01 | |||
| JP2007059385A | 2007-03-08 | |||
| JP2009212129A | 2009-09-17 | |||
| JP2010036152A | 2010-02-18 | |||
| JP2012033385A | 2012-02-16 | |||
| JP2005332784A | 2005-12-02 | |||
| JP2009212129A | 2009-09-17 | |||
| JP2007059385A | 2007-03-08 | |||
| JP2010051941A | 2010-03-11 |
Other References:
See also references of EP 2779803A4
Attorney, Agent or Firm:
HIRAI YASUO (JP)
Yasuo Hirai (JP)
Yasuo Hirai (JP)
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Claims: