Title:
PLASMA GENERATOR BY MEANS OF RESONANT WAVEGUIDE
Document Type and Number:
WIPO Patent Application WO/2024/054025
Kind Code:
A1
Abstract:
A plasma generator by means of a resonant waveguide is disclosed. The plasma generator comprises: an annular or elliptical central waveguide that includes a plurality of slots on the inner side surface thereof; a first incident waveguide that is tangentially connected to the central waveguide to enable electromagnetic wave communication; an electromagnetic wave supply unit that transmits electromagnetic waves to the incident waveguide; and a plasma chamber that has an electromagnetic wave incident window which is positioned on an outlet side of the slots to seal the inside of the central waveguide, and through which electromagnetic waves introduced through the slots may be radiated to the outside.
Inventors:
JANG SOO OUK (KR)
LHO TAI HYEOP (KR)
CHOI YONG SUP (KR)
LEE KANG IL (KR)
PARK HYUN JAE (KR)
SHIN JIN HA (KR)
LHO TAI HYEOP (KR)
CHOI YONG SUP (KR)
LEE KANG IL (KR)
PARK HYUN JAE (KR)
SHIN JIN HA (KR)
Application Number:
PCT/KR2023/013313
Publication Date:
March 14, 2024
Filing Date:
September 06, 2023
Export Citation:
Assignee:
KOREA INST OF FUSION ENERGY (KR)
International Classes:
H01J37/32; H01P5/18; H05H1/46
Foreign References:
| KR100220132B1 | 1999-09-01 | |||
| KR20040049271A | 2004-06-11 | |||
| JP2012049353A | 2012-03-08 | |||
| KR20200099374A | 2020-08-24 | |||
| US7156046B2 | 2007-01-02 | |||
| KR2023013315W | 2023-09-06 |
Attorney, Agent or Firm:
NAM, Gun Pil et al. (KR)
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