Title:
PLASMA GENERATOR AND PROCESS TREATMENT APPARATUS COMPRISING SAME
Document Type and Number:
WIPO Patent Application WO/2022/035300
Kind Code:
A1
Abstract:
This plasma generator comprises: a reactor main body having a gas inlet on one side; and a collector, connected to the other side of the reactor main body, having a collection space therein. The reactor main body and collector provide reaction spaces in which a plasma channel is formed.
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| WO/2004/059702 | METHOD AND APPARATUS FOR MONITORING A MATERIAL PROCESSING SYSTEM |
Inventors:
CHOI DAI KYU (KR)
Application Number:
PCT/KR2021/010868
Publication Date:
February 17, 2022
Filing Date:
August 17, 2021
Export Citation:
Assignee:
NP HOLDINGS CO LTD (KR)
International Classes:
H01J37/32
Foreign References:
| KR102113293B1 | 2020-06-16 | |||
| KR102113294B1 | 2020-06-16 | |||
| KR20200048982A | 2020-05-08 | |||
| KR200419108Y1 | 2006-06-15 | |||
| KR101296717B1 | 2013-08-20 | |||
| KR20090102183A | 2009-09-30 | |||
| KR101776235B1 | 2017-09-11 |
Attorney, Agent or Firm:
JOOYON IP & LAW (KR)
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