Title:
PLASMA PROCESS SYSTEM FOR MULTI-STATION
Document Type and Number:
WIPO Patent Application WO/2023/128627
Kind Code:
A1
Abstract:
According to one embodiment of the present specification, provided is a plasma process system for a multi-station, comprising: a process chamber including at least two stations; one plasma generator per station; one inverter per plasma generator; a sensing unit for measuring electric properties of each plasma generator; and a controller acquiring sensing data from the sensing unit in order to control each inverter.
Inventors:
UHM SAE HOOON (KR)
JEGAL DONG (KR)
SOHN YEONGHOON (KR)
CHOE GYUENG HYUEN (KR)
PARK SE HONG (KR)
HUH JIN (KR)
JEGAL DONG (KR)
SOHN YEONGHOON (KR)
CHOE GYUENG HYUEN (KR)
PARK SE HONG (KR)
HUH JIN (KR)
Application Number:
PCT/KR2022/021551
Publication Date:
July 06, 2023
Filing Date:
December 28, 2022
Export Citation:
Assignee:
EN2CORE TECH INC (KR)
International Classes:
H01J37/32
Foreign References:
| KR20100053531A | 2010-05-20 | |||
| KR20140139621A | 2014-12-05 | |||
| US20100194279A1 | 2010-08-05 | |||
| US20170365907A1 | 2017-12-21 | |||
| US20070080140A1 | 2007-04-12 |
Attorney, Agent or Firm:
IPLAY PATENT LAW FIRM (KR)
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