Title:
PLASMA THERMAL SPRAY DEVICE AND THERMAL SPRAY CONTROL METHOD
Document Type and Number:
WIPO Patent Application WO/2018/088252
Kind Code:
A1
Abstract:
Provided is a plasma thermal spray device comprising: a supply unit wherein a thermal spray material powder is carried by a plasma-generating gas and sprayed from an opening at a leading end portion thereof; a plasma-generating unit using the sprayed plasma-generating gas to generate plasma whereof the axis is common with that of the supply unit; a magnetic field generation unit generating a magnetic field in a generation space for the plasma; and a control unit controlling the magnetic field generation unit thereby controlling the deviation of the plasma being generated.
Inventors:
KOBAYASHI YOSHIYUKI (JP)
HIMORI SHINJI (JP)
FURUYA NAOKAZU (JP)
HIMORI SHINJI (JP)
FURUYA NAOKAZU (JP)
Application Number:
PCT/JP2017/038958
Publication Date:
May 17, 2018
Filing Date:
October 27, 2017
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
H05H1/42; C23C4/134; H05H1/40
Foreign References:
| JPH05195189A | 1993-08-03 | |||
| JPH08273893A | 1996-10-18 | |||
| US20090047439A1 | 2009-02-19 | |||
| JPH03133099A | 1991-06-06 | |||
| JPS63162850A | 1988-07-06 | |||
| JP2015025201A | 2015-02-05 |
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
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