Title:
PLASMA TREATMENT APPARATUS
Document Type and Number:
WIPO Patent Application WO/2023/284023
Kind Code:
A1
Abstract:
Embodiments of the present application disclose a plasma treatment apparatus, comprising: an electrostatic chuck, the periphery of which has a connecting surface; an edge adjustment ring, which is arranged around the circumference of the electrostatic chuck, an inner wall of the edge adjustment ring being opposite to an outer wall of the electrostatic chuck; and an edge ring, which is arranged around the electrostatic chuck, disposed above the connecting surface, and located above the edge adjustment ring, wherein the edge adjustment ring comprises: an annular body, and an annular protrusion which protrudes toward the edge ring; and the annular body is relatively close to the electrostatic chuck.
Inventors:
ZHENG FENCHENG (CN)
Application Number:
PCT/CN2021/109702
Publication Date:
January 19, 2023
Filing Date:
July 30, 2021
Export Citation:
Assignee:
CHANGXIN MEMORY TECH INC (CN)
International Classes:
H01J37/32; H01L21/67
Foreign References:
| CN111146066A | 2020-05-12 | |||
| CN108242382A | 2018-07-03 | |||
| CN113097044A | 2021-07-09 |
Attorney, Agent or Firm:
CHINA PAT INTELLECTUAL PROPERTY OFFICE (CN)
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