Title:
PLASMA TREATMENT DEVICE COMPRISING BORON CARBIDE, AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2019/156296
Kind Code:
A1
Abstract:
Disclosed are a plasma treatment device comprising a boron carbide coating layer, and a manufacturing method therefor, the device having excellent corrosion resistance against plasma, ensuring the uniformity of plasma distribution, improving electrical conductivity and thermal conductivity, and having a simple structure. The device and the method comprise: a chamber having a reaction space for plasma treatment; and a component positioned inside the chamber and coming in contact with plasma, wherein the component is boron carbide having corrosion resistance against plasma and having a volume resistivity of 105-10-5Ωㆍcm.
Inventors:
HWANG SUNG SIC (KR)
SUN HO JUNG (KR)
LEE JAE BUM (KR)
OH JUN ROK (KR)
KIM HYUN JUNG (KR)
MIN KYOUNG YEOL (KR)
KIM KYUNG IN (KR)
SUN HO JUNG (KR)
LEE JAE BUM (KR)
OH JUN ROK (KR)
KIM HYUN JUNG (KR)
MIN KYOUNG YEOL (KR)
KIM KYUNG IN (KR)
Application Number:
PCT/KR2018/008595
Publication Date:
August 15, 2019
Filing Date:
July 30, 2018
Export Citation:
Assignee:
SKC SOLMICS CO LTD (KR)
International Classes:
H01J37/32; C23C28/04
Foreign References:
| KR100588265B1 | 2006-08-30 | |||
| KR20040101330A | 2004-12-02 | |||
| JP2009127079A | 2009-06-11 | |||
| KR20030063486A | 2003-07-28 | |||
| JP2010156009A | 2010-07-15 |
Attorney, Agent or Firm:
AHN, Seung Tae (KR)
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