Title:
PLASMA TREATMENT DEVICE AND ELECTRODE MECHANISM
Document Type and Number:
WIPO Patent Application WO/2022/215680
Kind Code:
A1
Abstract:
Provided is a plasma treatment device having a treatment chamber and an electrode mechanism used for a plasma treatment, wherein the electrode mechanism comprises: an electrode unit to which high-frequency power is applied; a dielectric unit disposed to be layered on the electrode unit; an electrical circuit at least a part of which is disposed inside the dielectric unit; and a shield member disposed inside the dielectric unit so as to be superposed with at least a part of the electrical circuit when viewed at least either in a plan view or a side view.
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Inventors:
MATSUMOTO NAOKI (JP)
Application Number:
PCT/JP2022/017038
Publication Date:
October 13, 2022
Filing Date:
April 04, 2022
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
H05H1/46; H01L21/3065; H01L21/31
Domestic Patent References:
| WO2020055565A1 | 2020-03-19 |
Foreign References:
| JP2017028111A | 2017-02-02 | |||
| JP2014229734A | 2014-12-08 | |||
| JP2019140155A | 2019-08-22 | |||
| JP2020068247A | 2020-04-30 |
Attorney, Agent or Firm:
KANEMOTO, Tetsuo et al. (JP)
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