Title:
PLATE-LIKE SILICON NITRIDE-BASED SINTERED BODY AND METHOD FOR PRODUCING SAME
Document Type and Number:
WIPO Patent Application WO/2021/117829
Kind Code:
A1
Abstract:
The present invention provides a method for obtaining a plate-like silicon nitride-based sintered body which exhibits high thermal conductivity and excellent mechanical characteristics (strength and fracture toughness). In the present invention, a plate-like silicon nitride-based sintered body in which the oxygen content and the ratio of alkaline earth metal content and rare earth metal content are controlled highly accurately is produced by: adding a sintering aid to a silicon nitride raw material obtained by blending a first silicon nitride powder, which has a β fraction of 0-10% and has a specified oxygen content, specific surface area and average particle diameter, and a second silicon nitride powder, which has a β fraction of 60-100% and has a specified oxygen content, specific surface area, average particle diameter and aspect ratio, thereby preparing a starting material composition; producing a green sheet from the starting material composition using a sheet molding process; and then sintering by holding the green sheet in a pressurized atmosphere having a nitrogen-containing gas pressure of 0.15-3 MPa in a temperature region in which the maximum holding temperature is 1790-1910ºC. Also provided are a raw material powder mixture and a silicon nitride-based sintered body.
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Inventors:
FUJINAGA TAKERU (JP)
INO AKI (JP)
HONDA MICHIO (JP)
FUJINAGA MASATAKA (JP)
SHIBATA KOJI (JP)
YAMADA TETSUO (JP)
INO AKI (JP)
HONDA MICHIO (JP)
FUJINAGA MASATAKA (JP)
SHIBATA KOJI (JP)
YAMADA TETSUO (JP)
Application Number:
PCT/JP2020/046124
Publication Date:
June 17, 2021
Filing Date:
December 10, 2020
Export Citation:
Assignee:
UBE INDUSTRIES (JP)
International Classes:
C04B35/593; C01B21/068; C04B35/587; H05K1/03
Domestic Patent References:
| WO2010002001A1 | 2010-01-07 | |||
| WO2013146713A1 | 2013-10-03 | |||
| WO2019235593A1 | 2019-12-12 | |||
| WO2019235594A1 | 2019-12-12 |
Foreign References:
| JP2006096661A | 2006-04-13 | |||
| JP2018070436A | 2018-05-10 | |||
| JP2019052072A | 2019-04-04 | |||
| JP2001064080A | 2001-03-13 |
Attorney, Agent or Firm:
AOKI, Atsushi et al. (JP)
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