Title:
PLATE MODE RESONATOR DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/236332
Kind Code:
A1
Abstract:
An acoustic resonator device (1) comprising a substrate (2) and a piezoelectric layer (3), such as LN membrane, sandwiched between a floating potential bottom electrode (6) and pairs of top electrodes (7) to which RF voltage is applied, wherein a plurality of pedestals (8) are arranged periodically between the piezoelectric layer (3) and the substrate (2) to provide mechanical stability and heat evacuation. The pedestals (8) may be arranged to align with nods (12) of acoustic amplitudes of the piezoelectric layer (3) located in regions between the top electrodes to minimize acoustic energy leaking through pedestals (8). The substrate (2) may comprise a first substrate layer (15) of high acoustic wave velocity and high thermal conductivity such as diamond, supported on a second substrate layer (16) of a wafer material.
Inventors:
PLESSKI VIKTOR (FI)
ZHANG NAIQING (CN)
ZHANG NAIQING (CN)
Application Number:
PCT/CN2022/109290
Publication Date:
December 14, 2023
Filing Date:
July 30, 2022
Export Citation:
Assignee:
HUAWEI TECH CO LTD (CN)
International Classes:
H03H9/17
Domestic Patent References:
| WO2013102342A1 | 2013-07-11 |
Foreign References:
| CN216981876U | 2022-07-15 | |||
| CN111900949A | 2020-11-06 | |||
| CN113193847A | 2021-07-30 | |||
| CN107025321A | 2017-08-08 |
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