US20030214695A1 | 2003-11-20 |
CLAIMS
I claim:
1. A nano-resonating structure comprising:
at least one ultra-small resonant structure mounted on a substrate, a
source of charged particles arranged to excite and cause the at least one ultra-small
resonant structure to resonate to thereby produce EMR, and at least one additional
structure positioned adjacent the at least one ultra-small resonant structure so that
at least a portion of an exterior surface of the additional structure will act as a
reflector of at least a portion of the EMR being produced.
2. The nano-resonating structure as in claim 1 further
comprising an array comprised of at least two ultra-small resonant structures.
3. The nano-resonating structure as in claim 2 wherein the at
least one additional structure comprises an elongated structure extending along at
least a portion of the array.
4. The nano-resonating structure as in claim 2 further including
a plurality of additional structures.
5. The nano-resonating structure as in claim 4 wherein each of
the plurality of additional structures comprises an ultra small structure arranged as
a series of spaced apart individual reflectors.
6. The nano-resonating structure as in claim 1 wherein the at
least one additional structure has a rough exterior surface.
7. The nano-resonating structure as in claim 1 wherein the at
least one additional structure has at least one angled reflecting surface.
8. The nano-resonating structure as in claim 1 wherein the at
least one additional structure has a surface that will reflect and focus EMR
directed there towards.
9. The nano-resonating structure as in claim 1 wherein the at
least one additional structure exhibits a multi-directional reflecting exterior
surface.
10. The nano-resonating structure as in claim 2 wherein the at
least one additional structure is positioned on one side of the array.
11. The nano-resonating structure as in claim 2 wherein the at
least one additional structure is positioned on two sides of the array.
12. The nano-resonating structure as in claim 2 wherein the at
least one additional structure is positioned on opposite sides of the array.
13. The nano-resonating structure as in claim 2 further including
a plurality of additional structures that are segmented and spaced apart along the
array.
14. The nano-resonating structure as in claim 1 wherein all of the
EMR being produced by the at least one ultra-small resonant structure.
15. A nano-reflecting structure comprising a substrate having
formed thereon a nano-structure having at least one portion of an exterior surface
that will reflect EMR directed there toward.
16. The nano-reflecting structure as in claim 15 wherein the
exterior surface is multi-faceted to reflect EMR in a plurality of directions.
17. The nano-reflecting structure as in claim 15 wherein the
nano-structure comprises a series of spaced apart structures.
18. The nano-reflecting structure as in claim 15 wherein the
nano-stracture comprises an elongated structure.
19. The nano-reflecting structure as in claim 15 further
comprising a plurality of nano-structures each having a multi-faceted exterior
capable of reflecting at least a portion of EMR directed there toward.
20. The nano-reflecting structure as in claim 19 wherein the
nano-reflecting structure reflects in a multi-directional manner.
21. The nano-reflecting structure as in claim 15 wherein the at
least one portion of an exterior surface that is reflecting comprises a side surface.
22. The nano-reflecting structure as in claim 15 wherein the at
least one portion of an exterior surface that is reflecting comprises a top surface. |
PLATED MULTI-FACETED RELFECTOR
COPYRIGHT NOTICE
[0001] A portion of the disclosure of this patent document contains material
which is subject to copyright or mask work protection. The copyright or mask
work owner has no objection to the facsimile reproduction by any one of the
patent document or the patent disclosure, as it appears in the Patent and Trademark
Office patent file or records, but otherwise reserves all copyright or mask work
rights whatsoever.
CROSS-REFERENCE TO CO-PENDING APPLICATIONS
[0002] The present invention is related to the following co-pending U.S.
Patent applications: (1) U.S. Patent Application No. 11/238,991 [atty. docket
2549-0003], filed September 30, 2005, entitled "Ultra-Small Resonating Charged
Particle Beam Modulator"; (2) U.S. Patent Application No. 10/917,511 [atty.
docket 2549-0002], filed on August 13, 2004, entitled "Patterning Thin Metal Film
by Dry Reactive Ion Etching"; (3) U.S. Application No. 11/203,407 [atty. docket
2549-0040], filed on August 15, 2005, entitled "Method Of Patterning Ultra-Small
Structures"; (4) U.S. Application No. 11/243,476 [Atty. Docket 2549-0058], filed
on October 5, 2005, entitled "Structures And Methods For Coupling Energy From
An Electromagnetic Wave"; (5) U.S. Application No. 11/243,477 [Atty. Docket
2549-0059], filed on October 5, 2005, entitled "Electron beam induced
resonance/', (6) U.S. Application No. 11/325,432 [Atty. Docket 2549-0021],
entitled "Resonant Structure-Based Display," filed on January 5, 2006; (7) U.S.
Application No. 11/325,571 [Atty. Docket 2549-0063], entitled "Switching Micro-
Resonant Structures By Modulating A Beam Of Charged Particles," filed on
January 5, 2006; (8) U.S. Application No. 11/325,534 [Atty. Docket 2549-0081],
entitled "Switching Micro-Resonant Structures Using At Least One Director,"
filed on January 5, 2006; (9) U.S. Application No. 11/350,812 [Atty. Docket 2549-
0055], entitled "Conductive Polymers for the Electroplating", filed on February
10, 2006; (10) U.S. Application No. 11/302,471 [Atty. Docket 2549-0056],
entitled "Coupled Nano-Resonating Energy Emitting Structures," filed on
December 14, 2005; and (11) U.S. Application No. 11/325,448 [Atty. Docket
2549-0060], entitled "Selectable Frequency Light Emitter", filed on January 5,
2006, which are all commonly owned with the present application, the entire
contents of each of which are incorporated herein by reference.
FIELD OF THE DISCLOSURE
[0003] This disclosure relates to multi-directional electromagnetic radiation
output devices, and particularly to ultra-small resonant structures, and arrays
formed there from, together with the formation of, in conjunction with and in
association with separately formed reflectors, positioned adjacent the ultra-small
resonant structures. As the ultra-small resonant structures are excited and produce
out put energy, light or other electromagnetic radiation (EMR), that output will be
observable in or from multiple directions.
INTRODUCTION
[0004] Electroplating is well known and is used in a variety of applications,
including the production of microelectronics, and in particular the ultra-small
resonant structures referenced herein. For example, an integrated circuit can be
electroplated with copper to fill structural recesses. In a similar way, a variety of
etching techniques can also be used to form ultra-small resonant structures. In this
regard, reference can be had to Serial No. 10/917,511 and 11/203,407, previously
noted above, and attention is directed to them for further details on each of these
techniques, consequently those details do not need to be repeated herein.
[0005] Ultra-small structures encompass a range of structure sizes
sometimes described as micro- or nano-sized. Objects with dimensions measured
in ones, tens or hundreds of microns are described as micro-sized. Objects with
dimensions measured in ones, tens or hundreds of nanometers or less are
commonly designated nano-sized. Ultra-small hereinafter refers to structures and
features ranging in size from hundreds of microns in size to ones of nanometers in
size.
[0006] The devices of the present invention produce electromagnetic
radiation by the excitation of ultra-small resonant structures. The resonant
excitation in a device according to the invention is induced by electromagnetic
interaction which is caused, e.g., by the passing of a charged particle beam in close
proximity to the device. The charged particle beam can include ions (positive or
negative), electrons, protons and the like. The beam may be produced by any
source, including, e.g., without limitation an ion gun, a tungsten filament, a
cathode, a planar vacuum triode, an electron-impact ionizer, a laser ionizer, a
chemical ionizer, a thermal ionizer, an ion-impact ionizer.
[0007] Plating techniques, in addition to permitting the creation of smooth
walled micro structures, also permit the creation of additional, free formed or
grown structures that can have a wide variety of side wall or exterior surface
characteristics, depending upon the plating parameters. The exterior surface can
vary from smooth to very rough structures, and a multitude of degrees of each in
between. Such additional ultra small structures can be formed or created adjacent
the primary formation or array of ultra-small resonant structures so that when the
latter are excited by a beam of charged particles moving there past, such additional
ultra-small structures can act as reflectors permitting the out put from the excited
ultra-small resonant structures to be directed or view from multiple directions.
[0008] A multitude of applications exist for electromagnetic radiating
devices that can produce EMR at frequencies spanning the infrared, visible, and
ultra-violet spectrums, in multiple directions.
GLOSSARY
[0009] As used throughout this document:
[0010] The phrase "ultra-small resonant structure" snail mean any structure
of any material, type or microscopic size that by its characteristics causes electrons
to resonate at a frequency in excess of the microwave frequency.
[0011] The term "ultra-small" within the phrase "ultra-small resonant
structure" shall mean microscopic structural dimensions and shall include
so-called "micro" structures, "nano" structures, or any other very small structures
that will produce resonance at frequencies in excess of microwave frequencies.
DESCRIPTION OF PRESENTLY PREFERRED EXAMPLES OF THE INVENTION
BRIEF DESCRIPTION OF FIGURES
[0012] The invention is better understood by reading the following detailed
description with reference to the accompanying drawings in which:
[0013] Figs. 1A-1C comprise a diagrammatic showing of three steps in
forming the reflectors;
[0014] Fig. 2A-2E comprise a diagrammatic showing of forming a reflector
having an alternative shape;
[0015] Fig. 3 shows one exemplary configuration of ultra-small resonant
structures and the additional reflectors; and
[0016] Fig. 4 shows another exemplary configuration of ultra-small
resonant structures and additional reflectors.
DESCRIPTION
[0017] Figure IA is a schematic drawing of selected steps in the process of
forming ultra-small resonant structures and the additional structures that will serve
as reflectors. It should be understood that the reflectors disclosed herein are
deemed novel in their own right, and the invention contemplates the formation and
use of reflectors by themselves, as well as in combination with other structures
including the ultra-small resonant structures referenced herein and in the above
applications. Reference can be made to Application serial Nos. 11/203,407 for
details on electro plating processing techniques that can be used in the formation
of ultra-small resonant structures as well as the additional ultra-small structures
that will serve as reflectors, and those techniques will not be repeated herein.
[0018] In one presently preferred embodiment, an array of ultra-small
resonant structures can be prepared by evaporating a 0.1 to 0.3 nanometer thick
layer of nickel (Ni) onto the surface of a silicon (Si) wafer, or a like substrate, to
form a conductive layer on that substrate. The artisan will recognize that the
substrate need not be silicon. The substrate can be substantially flat and may be
either conductive or non-conductive with a conductive layer applied by other
means. In the same processing a 10 to 300 nanometer layer of silver (Ag) can then
be deposited using electron beam evaporation on top of the nickel layer.
Alternative methods of production can also be used to deposit the silver coating.
The presence of the nickel layer improves the adherence of silver to the silicon. In
an alternate embodiment, a thin carbon (C) layer may be evaporated onto the
surface instead of the nickel layers. Alternatively, the conductive layer may
comprise indium tin oxide (ITO) or comprise a conductive polymer or other
conductive materials.
[0019] The now-conductive substrate 102, with the nickel and silver
coatings thereon, is coated with a layer of photoresist as is shown in Figure IA at
110 or with an insulating layer, for example, silicon nitride (SiNx). In current
embodiments, a layer of polymethylmethacrylate (PMMA) is deposited over top
of the conductive coating. The PMMA may be diluted to produce a continuous
layer of 200 nanometers. The photoresist layer is exposed with a scanning
electron microscope (SEM) and developed to produce a pattern of the desired
device structure. The patterned substrate is positioned in an electroplating bath. A
range of alternate examples of photoresists, both negative and positive in type, can
be used to coat the conductive surface and then patterned to create the desired
structure. In Figure IA, ultra-small resonant structures are shown at 106 and 108
as having been previously formed in the patterned layer of photoresist or an
insulating layer 110. Figure IA- also shows the next step of depositing an
additional photoresist material 112 on top of and covering the existing previously
deposited photoresist or insulating layer 110 and covering the ultra-small resonant
structures 106 and 108. An opening is then formed in the material 112, down to
the opening 104 that remains in the material 110, and in subsequent processing a
free formed, or unconstrained structure 114 is in the process of being formed.
[0020] Figure IB shows the free formed, or unconstrained, structure 116
that has resulted from further electro plating processing and with the additional
photoresist material or insulating 112 removed. It should be understood that the
formation process, for these additional structures, can be controlled very precisely
so that it is possible to form any size or shape additional structures, and to control
the nature of the exterior surface of those additional structures.
[0021] Figure 1C shows the result following removal of the initial
photoresist layer 110 which leaves the ultra-small resonant structures 106 and 108
as well as the additional structure 116 formed there between. It should be noted
that this photoresist or insulating layer does not need to be removed, but can be
left in place. This additional structure 116 can have a wide variety of side wall
morphologies varying from smooth to very rough, so that a number of surfaces
thereof can be reflective surfaces, including all or portions of the sides, the top and
a variety of angled or other surfaces there between. For reflection purposes it is
preferred to have the outer surface of the additional structure 116 formed with a
very rough exterior. Light or other EMR emanating from each of the ultra-small
resonant structures 106 and 108, in the direction of the additional structure 116,
can then be reflected by the exterior of that additional structure 116 in a multiple
of directions as indicated at 120. As a result, various devices for receiving the
produced EMR, such as light and colors, which can vary from optical pick up
devices to the human eye, will be able to see the reflected energy from multiple
directions.
[0022] Figure 2A shows another embodiment where the substrate 202, on
which the Ni and Ag has been applied, has already had a layer of photoresist or
insulating material 210 deposited and an ultra-small resonant structure 206 has
been formed. An additional amount of photoresist 212 has been deposited over
the first photoresist 210 and over the ultra-small resonant structure 206. To the
right of the ultra-small resonant structure 206 an opening 211 has been made in the
photoresist layer 210, and additional photoresist material 215 has been deposited
on the right side of the substrate 202. The outer portion is shown in dotted line to
indicate that this photoresist material 215 can extend to the edge of the substrate
202. whether that edge is near the opening 211 or the outer edge of a chip or circuit
board, as shown in the solid lines, or farther away as shown by the dotted lines.
This additional photoresist material 215 is also formed with a flat, vertical interior
surface 216. Subsequent electroplating steps will then begin the process of
forming or growing an additional structure which is shown in an initial stage of
development at 214. It should be understood that the photoresist material could be
shaped in any desired manner so that some portion of the additional structure
subsequently being formed can then take on the mirror image of that shaped
structure. Thus, flat walls, curved walls, angled or angular surfaces, as well as
many other shapes or exterior surfaces, in addition to rough exterior surfaces,
could be created to accomplish a variety of desired results as a designer might
desire. For example, it might be desired to have a particular angle or shape
formed on a reflector surface to angle or focus the produced energy put in a
particular direction or way.
[0023] Figure 2B demonstrates that the additional structure 226 has been
formed and with the material 215 removed, or not since removal is not required,
the additional structure 226 has a flat exterior wall surface 228 where it was in
contact with photoresist material at the surface 216.
[0024] Figure 2C shows that all of the photoresist material has been
removed, even though it does not need to be, leaving the ultra-small resonant
structure 206 and the additional structure 226 on substrate 202. As shown by the
lines 220, light or energy produced by the ultra-small resonant structure 206 when
excited and which is directed toward the additional structure 226 will be reflected
in multiple directions by the rough exterior surface thereon.
[0025] In Figure 2D another embodiment is shown where the substrate 302,
similar to the substrates described above, has been coated with a layer of
photoresist or an insulating layer 310 and an ultra-small resonant structure 306 has
been formed. Additional photoresist material has been deposited over the whole
substrate and a hole has been formed down to the substrate and layer 310 as
indicated by the dotted line at 320. This has also formed the two opposing vertical
walls 316 and 318. The subsequent electro plating will form the structure 314
where one side has developed in an unconstrained way and is irregular while the
portion in contact with wall 318 is flat and relatively smooth, and a mirror image
of wall 318. Once the material 312 is removed, as shown in Figure 2E, the ultra-
small resonant structure 306 and the additional ultra-small structure 314 remain.
The additional ultra-small structure 314 will act as a reflector of the EMR or light
emitted by 306 as shown by the waves 322.
[0026] It should be understood that a wide variety of shapes, sizes and
styles of ultra-small resonant structures can be produced, as identified and
described in the above referenced applications, all of which are incorporated by
refrence herein. Consequently, Figure 3 and 4 show only two exemplary arrays of
ultra-small resonant structures where reflectors 116/226, like those described
above, have been formed outside of the arrays.
[0027] In Figure 3 an array 152 of a plurality of ultra-small resonant
structures 150 is shown with spacings between them 124 that extend from the
front of one ultra-small resonant structure to the front of the next adjacent
structure, and with widths 126. A beam of charged particles 130 is being directed
past the array 152 and a plurality of segmented or separately formed reflectors
116/226 are located on the side of the array 152 opposite to the side where beam
130 is passing. Consequently, light or other EMR being produced by the excited
array 152 of ultra-small resonant structures 150 will be reflected as shown at 154
in a multiple of directions by the reflectors 116/226. While a plurality of
separately formed reflectors are shown, it is also possible to form or grow one
elongated reflector as shown in dotted line at 116L.
[0028] Figure 4 shows an embodiment employing two parallel arrays of
ultra-small resonant structures, 155R and 155G, designating then as being red and
green light producing ultra-small resonant structures. A beam of charged particles
134 being generated by a source 140 and deflected by deflectors 160 as shown by
the multiple paths of that beam 134. The red and green light producing ultra-small
resonant structures 155R and 155G are being exited by beam 134 and the light
being produced is being reflected by the additional structures 116/226 located
along the arrays and on each side of the arrays opposite where beam 134 is
passing. This reflected light is shown at 170, and because the exterior surface of
the additional structures 116/226 is rough the reflected light will be visible in
multiple of directions. While the reflectors have been shown as being segmented
or spaced apart, they could also be in the form of one elongated reflector structure
175, or as several elongated reflector structures as shown at 176..
[0029] It should be understood that while a small oval structure, or the
elongated rectangles at 116L, 175 and 176, respectively, are being used in Figures
3 and 4 to represent the reflector structures, these reflectors can have a wide
variety of shapes, as noted previously above, and these representations in Figures
3 and 4 should not be viewed as being limiting in any way. Further, the invention
also comprises the reflectors themselves on a suitable substrate.
[0030] A wide range of morphologies can be achieved in forming the
additional structures to be used as reflectors, for example, by altering parameters
such as peak voltage, pulse widths, and rest times. Consequently, many exterior
surface types and forms can be produced allowing a wide range of reflector
surfaces depending upon the results desired.
[0031] Nano-resonating structures can be constructed with many types of
materials. Examples of suitable fabrication materials include silver, copper, gold,
and other high conductivity metals, and high temperature superconducting
materials. The material may be opaque or semi-transparent. In the above-
identified patent applications, ultra-small structures for producing electromagnetic
radiation are disclosed, and methods of making the same. In at least one
embodiment, the resonant structures of the present invention are made from at
least one layer of metal (e.g., silver, gold, aluminum, platinum or copper or alloys
made with such metals); however, multiple layers and non-metallic structures
(e.g., carbon nanotubes and high temperature superconductors) can be utilized, as
long as the structures are excited by the passage of a charged particle beam. The
materials making up the resonant structures may be deposited on a substrate and
then etched, electroplated, or otherwise processed to create a number of individual
resonant elements. The material-need not even be a contiguous layer, but can be a
series of resonant elements individually present on a substrate. The materials
making up the resonant elements can be produced by a variety of methods, such as
by pulsed-plating, depositing or etching. Preferred methods for doing so are
described in co-pending U.S. Application Nos. 10/917,571 and No. 11/203,407,
both of which were previously referenced above and incorporated herein by
reference.
[0032] While the invention has been described in connection with what is
presently considered to be the most practical and preferred embodiment, it is to be
understood that the invention is not to be limited to the disclosed embodiment, but
on the contrary, is intended to cover various modifications and equivalent
arrangements included within the spirit and scope of the appended claims.
Next Patent: TOP METAL LAYER SHIELD FOR ULTRA-SMALL RESONANT STRUCTURES