Title:
PLATING APPARATUS WITH INDIVIDUALLY CONTROLLABLE ANODE SEGMENTS AND ASSOCIATED METHOD
Document Type and Number:
WIPO Patent Application WO2001094656
Kind Code:
A3
Abstract:
A programmable/controllable anode and related methods of operation. An anode to be used with an electroplating system containing a substrate (48) acting as a cathode. The anode includes a plurality of anode segments (203a, ..., 203d) and an electrical source. The electrical source is coupled to each of the anode segments. One method comprises applying electrical voltage/current to one of said plurality of anode segments. The method continues by waiting for a prescribed duration, and then applying electrical voltage/current to another one of said plurality of anode segments. Another aspect comprises first sensing the electric field generated by the anode. The method finishes by controlling the electricity supplied between different ones of the anode segments to provide a uniform electric field.
Inventors:
DORDI YEZDI
Application Number:
PCT/US2001/017864
Publication Date:
March 07, 2002
Filing Date:
June 01, 2001
Export Citation:
Assignee:
APPLIED MATERIALS INC (US)
International Classes:
C25D17/12; C25D21/12; H01L21/288; (IPC1-7): C25D17/12
Domestic Patent References:
| WO1999041434A2 | 1999-08-19 |
Foreign References:
| US4828654A | 1989-05-09 | |||
| US5156730A | 1992-10-20 |
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