PMUT STRUCTURE HAVING THINNED PORTION, MANUFACTURING METHOD THEREFOR, AND ELECTRONIC DEVICE COMPRISING SAME

WIPO Patent Application WO/2024/093469

A1

A PMUT structure having a thinned portion, a manufacturing method therefor, and an electronic device comprising same. The PMUT structure comprises: a substrate (100), the substrate (100) being provided with a cavity (101); a PMUT comprising a first electrode layer (400), a piezoelectric layer (300), and a second electrode layer (200), the first electrode layer (400) and the second electrode layer (200) being respectively arranged on one side and the other side of the piezoelectric layer (300); at least one gap portion (301), the gap portion (301) extending through at least the piezoelectric layer (300) in the thickness direction of the PMUT and at least partially overlapping the cavity (101) in the thickness direction of the PMUT, and the open end of the gap portion (301) close to the cavity (101) being in communication with the cavity (101); and a barrier layer (500), wherein the barrier layer (500) covers the open end face of the gap portion (301) away from the cavity (101).

WO/2006/116915	PIEZOELECTRIC FLUID ATOMIZER APPARATUSES AND METHODS
WO/2021/192387	VIBRATION DEVICE AND VIBRATION CONTROL METHOD

PANG WEI (CN)
NIU PENGFEI (CN)
ZHANG MENGLUN (CN)

PCT/CN2023/115182

May 10, 2024

August 28, 2023

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GUANGZHOU LEYI INVEST CO LTD (CN)

B06B1/06

TWI732688B	2021-07-01
CN106660074A	2017-05-10
CN108698084A	2018-10-23
CN107511318A	2017-12-26
CN110560350A	2019-12-13
CN111151431A	2020-05-15
CN112076973A	2020-12-15
CN114535038A	2022-05-27
US20160107194A1	2016-04-21
US20170021391A1	2017-01-26
US20200194658A1	2020-06-18

BEIJING JINCHENGTONGDA & NEAL LAW FIRM (CN)

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