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Title:
PNEUMATIC DIAPHRAGM HEAD HAVING AN INDEPENDENT RETAINING RING AND MULTI-REGION PRESSURE CONTROL, AND METHOD TO USE THE SAME
Document Type and Number:
WIPO Patent Application WO2001087541
Kind Code:
A3
Abstract:
An apparatus and method for planarizing a substrate are provided. The apparatus (101) includes a carrier (202) having: a plate (212) for receiving the substrate (230) thereon; a first chamber (238) for forcing the plate in a predetermined direction; a spacer (260) coupled to an outer edge of the plate (212); a membrane (250) coupled to the plate via the spacer (260) and separated from the plate by a thickness of the spacer; and a second chamber (251) defined between the membrane and the plate for forcing the membrane in another predetermined direction. The method involves pressing a peripheral edge of the substrate (244) against a polishing pad (226) with a first pressure, and pressing an interior of the substrate (244) against the pad (226) with a second pressure.

Inventors:
KAJIWARA JIRO
MOLONEY GERARD S
WANG HUEY-MING
HANSEN DAVID A
REYES ALEJANDRO
Application Number:
PCT/US2001/015306
Publication Date:
March 28, 2002
Filing Date:
May 11, 2001
Export Citation:
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Assignee:
MULTI PLANAR TECHNOLOGIES INC (US)
International Classes:
B24B37/30; B24B37/32; B24B49/16; H01L21/304; (IPC1-7): B24B37/04; B24B41/06; B24B49/16
Domestic Patent References:
WO1999062672A11999-12-09
WO2000021715A22000-04-20
Foreign References:
FR2778129A11999-11-05
EP0774323A21997-05-21
EP0868975A11998-10-07
DE19941903A12001-03-15
US6093089A2000-07-25
US5820448A1998-10-13
EP0650806A11995-05-03
EP0847835A11998-06-17
US5941758A1999-08-24
EP1029633A12000-08-23
EP0841123A11998-05-13
EP0169932A11986-02-05
US4918869A1990-04-24
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