Title:
POLARIZED-LIGHT IRRADIATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2016/104280
Kind Code:
A1
Abstract:
A polarized-light irradiation device for performing a photo-alignment treatment or the like, wherein substrates are continuously supplied from one direction to a polarized-light irradiation region, and as a result, the direction of substrate introduction, polarized-light irradiation, and substrate delivery is one-way, treatment efficiency is improved, and during treatment, it is possible to ensure high accuracy by accurately maintaining substrate direction. A polarized-light irradiation device 1 equipped with a light-source unit 2 for irradiating a set irradiation region 2S with polarized light, and a stage 3 for moving a substrate W in an axial direction so as to pass through the irradiation region 2S, wherein: the stage 3 is equipped with a plurality of substrate-holding parts 30 for constantly maintaining substrate W direction on one side in the axial direction of the irradiation region 2S, and releasing the hold on the substrate W on the other side in the axial direction of the irradiation region 2S; and the substrate-holding parts 30 are configured in a manner such that before releasing the hold on one substrate W1 by one substrate holding part 30, another substrate-holding part 30 holds another substrate W2.
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Inventors:
HASHIMOTO KAZUSHIGE (JP)
ARAI TOSHINARI (JP)
ARAI TOSHINARI (JP)
Application Number:
PCT/JP2015/085201
Publication Date:
June 30, 2016
Filing Date:
December 16, 2015
Export Citation:
Assignee:
V TECHNOLOGY CO LTD (JP)
International Classes:
G02F1/13; G02F1/1337
Foreign References:
| JP5344105B1 | 2013-11-20 | |||
| JP2013228516A | 2013-11-07 | |||
| JP5734494B1 | 2015-06-17 | |||
| US20150194231A1 | 2015-07-09 |
Attorney, Agent or Firm:
EICHI Patent & Trademark Corp. et al. (JP)
Patent business corporation Wisdom international patent firm (JP)
Patent business corporation Wisdom international patent firm (JP)
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