Title:
POLISHING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2019/088600
Kind Code:
A1
Abstract:
The present invention relates to a polishing apparatus which is disposed below a polishing wheel so as to polish the surface of a workpiece, the polishing apparatus comprising: a frame which has a central shaft disposed collinearly to one side of the polishing wheel and rotates about the central shaft; a plurality of seating parts which are disposed on the upper side of the frame, each have a space formed in the central portion thereof, seat a workpiece on the upper surfaces thereof, and are arranged radially from the central shaft of the frame; a plurality of vacuum parts which are disposed in the central portions of the plurality of seating parts respectively, seat a workpiece on the upper surfaces thereof, and each have a plurality of flow channels so as to secure the workpiece by suctioning air through the flow channels; and a control part for controlling the rotation of the frame.
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Inventors:
KIM HYOUNG JOO (KR)
Application Number:
PCT/KR2018/012857
Publication Date:
May 09, 2019
Filing Date:
October 26, 2018
Export Citation:
Assignee:
AM TECH CO LTD (KR)
International Classes:
B24B37/30; B24B41/06; H01L21/67
Foreign References:
| JP2012101293A | 2012-05-31 | |||
| JPH0788760A | 1995-04-04 | |||
| JPS6176270A | 1986-04-18 | |||
| JPH10138071A | 1998-05-26 | |||
| JP2002210624A | 2002-07-30 |
Attorney, Agent or Firm:
TAEBAEK INTELLECTUAL PROPERTY LAW FIRM (KR)
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