Title:
POLISHING COMPOSITION
Document Type and Number:
WIPO Patent Application WO/2016/072371
Kind Code:
A1
Abstract:
Provided is a polishing composition for polishing materials to be polished having a Vickers hardness of 1,500 Hv or higher. With this polishing composition, the relationship between the oxidation-reduction potential ORPx [mV] of the polishing composition and the oxidation-reduction potential ORPy [mV] of the material to be polished satisfy the following equation: ORPx - ORPy ≥ 100 mV.
Inventors:
TAKAHASHI SHUHEI (JP)
TOMATSU MASATOSHI (JP)
TOMATSU MASATOSHI (JP)
Application Number:
PCT/JP2015/080844
Publication Date:
May 12, 2016
Filing Date:
October 30, 2015
Export Citation:
Assignee:
FUJIMI INC (JP)
International Classes:
C09K3/14; B24B37/00; H01L21/304
Domestic Patent References:
| WO2013150822A1 | 2013-10-10 | |||
| WO2011070898A1 | 2011-06-16 | |||
| WO2012147605A1 | 2012-11-01 | |||
| WO2015059987A1 | 2015-04-30 |
Foreign References:
| JP2008068390A | 2008-03-27 | |||
| JP2007311586A | 2007-11-29 | |||
| JP2011513991A | 2011-04-28 | |||
| JP2007021703A | 2007-02-01 |
Other References:
See also references of EP 3216839A4
Attorney, Agent or Firm:
ABE MAKOTO (JP)
Makoto Abe (JP)
Makoto Abe (JP)
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