Title:
POLISHING HEAD DRIVING DEVICE AND POLISHING MACHINE
Document Type and Number:
WIPO Patent Application WO/2024/001048
Kind Code:
A1
Abstract:
A polishing head driving device and a polishing machine. The polishing head driving device comprises: a main shaft (6), which is used for connecting to a polishing head (1); a bearing seat (5), which is sleeved outside the main shaft (6) and is rotatably connected to the main shaft (6); and a direct drive motor having a stator (7), which is fixedly connected to the bearing seat (5), and a rotor (8), which is sleeved outside the main shaft (6) and is in transmission connection with the main shaft (6). The direct drive motor is used to drive the main shaft, so that the size and weight of the polishing head driving device are greatly reduced, the overall structure of the polishing head driving device is simplified, the assembly is simple and is easy to maintain, and the production efficiency is ensured and a failure rate of the device is reduced.
Inventors:
WU RUIMING (CN)
SUI XUDONG (CN)
YUAN JINBO (CN)
ZHAN XINPING (CN)
SUI XUDONG (CN)
YUAN JINBO (CN)
ZHAN XINPING (CN)
Application Number:
PCT/CN2022/136292
Publication Date:
January 04, 2024
Filing Date:
December 02, 2022
Export Citation:
Assignee:
KEDA IND GROUP CO LTD (CN)
International Classes:
B24B41/04; B24B47/12; B24B55/02
Foreign References:
| CN115338777A | 2022-11-15 | |||
| CN217914741U | 2022-11-29 | |||
| CN101337335A | 2009-01-07 | |||
| CN109027233A | 2018-12-18 | |||
| CH662066A5 | 1987-09-15 | |||
| CN214186746U | 2021-09-14 |
Attorney, Agent or Firm:
GUANGZHOU SHENGLIHUA IP AGENT LTD (CN)
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