Title:
POLISHING PAD EQUIPPED WITH WINDOW AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2024/010132
Kind Code:
A1
Abstract:
Disclosed are a polishing pad equipped with a window and a method for manufacturing same, wherein, in the process of inserting and attaching a window into a polishing pad, no thermal melting/bonding scheme and no vibration melting/bonding scheme are applied such that the polishing pad is not deformed, and no polishing slurry leaks through a gap between the window and the polishing pad. The polishing pad equipped with a window comprises: a polishing layer having a first bored hole formed in the thickness direction; a window inserted/fixed into the first bored hole of the polishing layer; a lower support layer positioned below the polishing layer and the window, the lower support layer having a second bored hole formed on the lower end of the window so as to have a width smaller than that of the first bored hole or the window such that an optical beam is emitted therethrough; an attachment layer for mediating attachment between the polishing layer and the lower support layer, the adhesive layer having the same area as the lower support layer such that the adhesive layer partially overlaps a peripheral portion of the window and does not contact same; and a sealing attachment member positioned between the window and the attachment layer.
Inventors:
MIN BYUNG JU (KR)
HONG SEOK JI (KR)
KANG HAK SU (KR)
JUNG DAE HAN (KR)
PARK GI YOUNG (KR)
JANG HYUN IL (KR)
HONG SEOK JI (KR)
KANG HAK SU (KR)
JUNG DAE HAN (KR)
PARK GI YOUNG (KR)
JANG HYUN IL (KR)
Application Number:
PCT/KR2022/012019
Publication Date:
January 11, 2024
Filing Date:
August 11, 2022
Export Citation:
Assignee:
KPX CHEMICAL CO LTD (KR)
International Classes:
B24B37/20; B24B37/22; B24B37/24; B24D11/00; H01L21/67
Foreign References:
| KR20190114264A | 2019-10-10 | |||
| JP2004343090A | 2004-12-02 | |||
| KR20180117655A | 2018-10-29 | |||
| KR20030035951A | 2003-05-09 | |||
| US6641470B1 | 2003-11-04 | |||
| KR20220083351A | 2022-06-20 | |||
| KR20220008594A | 2022-01-21 |
Attorney, Agent or Firm:
KIM, Sung Ho (KR)
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