Title:
POLISHING PAD, METHOD FOR PRODUCING POLISHING PAD, AND METHOD FOR POLISHING SURFACE OF OPTICAL MATERIAL OR SEMICONDUCTOR MATERIAL
Document Type and Number:
WIPO Patent Application WO/2022/153961
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide: a polishing pad which uses, as a high-molecular-weight polyol of an isocyanate-terminated urethane prepolymer, a polyol that is different from conventionally used PTMG or the like, said polyol forming a polishing layer; a method for producing this polishing pad; and a method for polishing the surface of an optical material or semiconductor material, said method using this polishing pad. A polishing pad which has a polishing layer that contains a polyurethane resin, wherein: the polyurethane resin is a cured product of a curable resin composition that contains an isocyanate-terminated urethane prepolymer and a curing agent; the isocyanate-terminated urethane prepolymer is a reaction product of a polyol component and a polyisocyanate component; and the polyol component contains a polyol that has a carbonate group in each molecule.
Inventors:
KAWAMURA YOSHIHIDE (JP)
TATENO TEPPEI (JP)
KURIHARA HIROSHI (JP)
NARUSHIMA SATSUKI (JP)
TAKAMIZAWA YAMATO (JP)
OCHI KEISUKE (JP)
KAWASAKI TETSUAKI (JP)
TATENO TEPPEI (JP)
KURIHARA HIROSHI (JP)
NARUSHIMA SATSUKI (JP)
TAKAMIZAWA YAMATO (JP)
OCHI KEISUKE (JP)
KAWASAKI TETSUAKI (JP)
Application Number:
PCT/JP2022/000475
Publication Date:
July 21, 2022
Filing Date:
January 11, 2022
Export Citation:
Assignee:
FUJIBO HOLDINGS INC (JP)
International Classes:
B24B37/24; C08G18/10; C08G18/38; C08G18/44; C08G18/48; C08G18/76; C08J5/14; H01L21/304
Foreign References:
JP5661130B2 | 2015-01-28 | |||
JP2020157415A | 2020-10-01 | |||
JP5970636B2 | 2016-08-17 | |||
JP2014069273A | 2014-04-21 | |||
JP2004330411A | 2004-11-25 |
Attorney, Agent or Firm:
YAMAMOTO, Osamu et al. (JP)
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