Title:
POLISHING PAD RECYCLING PROCESSING DEVICE
Document Type and Number:
WIPO Patent Application WO/2024/099302
Kind Code:
A1
Abstract:
Disclosed in the present invention is a polishing pad recycling processing device, comprising: a polishing pad, an upper surface of which is provided with grooves; a work platform, which is fitted to a lower surface of the polishing pad to support the polishing pad and can rotate circumferentially; a bracket with a processing head capable of extending into the grooves; and a liquid delivery unit, which is used to deliver liquid to the polishing pad, wherein the liquid can flow into the grooves. The polishing pad is disposed on the work platform, the work platform or/and the bracket or/and the processing head move, and a relative displacement between the processing head and the grooves occurs in the extending direction of the grooves, so that the processing head deepens the cutting of the grooves to increase the depth of the grooves; and at this time, the liquid wets the surface of the polishing pad, or scours and cleans the surface of the polishing pad. By means of the present invention, on-line processing of a polishing pad is realized, without changing the inherent structure of the polishing pad and affecting the stability of the original process; the utilization rate of the polishing pad is improved, and the cost of the polishing pad is reduced; and the liquid delivery unit can realize internal cleaning of the grooves of the polishing pad and can scour away and clear debris from the surface of the polishing pad.
Inventors:
YANG YUANSI (CN)
YIN QI (CN)
YIN QI (CN)
Application Number:
PCT/CN2023/130138
Publication Date:
May 16, 2024
Filing Date:
November 07, 2023
Export Citation:
Assignee:
HANGZHOU SIZONE ELECTRONIC TECH INC (CN)
International Classes:
B24B53/017
Foreign References:
| US20150336236A1 | 2015-11-26 | |||
| JP2014054719A | 2014-03-27 | |||
| US20140273752A1 | 2014-09-18 | |||
| CN114083427A | 2022-02-25 | |||
| CN113597360A | 2021-11-02 | |||
| CN112975749A | 2021-06-18 | |||
| US20200353586A1 | 2020-11-12 |
Attorney, Agent or Firm:
HANGZHOU KAIZHI PATENT AGENCY (GENERAL PARTNERSHIP) et al. (CN)
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