Title:
POLYCRYSTALLINE FUSE TYPE NON-VOLATILE MEMORY AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2023/016282
Kind Code:
A1
Abstract:
The present invention provides a polycrystalline fuse type non-volatile memory and a manufacturing method therefor. The memory comprises a plurality of memory cells; the memory cells comprise polysilicon fuses; the polysilicon fuse comprises first, second, and third fuse segments connected in sequence; the first and third fuse segments are made of doped polysilicon; the second fuse segment is made of a material comprising intrinsic polysilicon. The present invention employs ion implantation to produce a sandwich polycrystalline region, that is, a structure of low-resistance polycrystalline region+intrinsic polycrystalline pinch point+low-resistance polycrystalline region, during a polycrystalline doping process. The structure enables effective control of the programming position of the memory cells, and causes the fusing position to be deterministic and controllable, thereby effectively improving the resistance value distribution of the memory cells after programming. The structure can also effectively improve the data stability of the memory cells before and after programming, and prevent data loss caused by reconnection after disconnection. In addition, an upper region of the structure uses an electrically conductive cover layer to shield a data storage part of each memory cell, thereby improving data security.
Inventors:
WANG HAO (CN)
ZHANG NAN (CN)
LIU XIAOHONG (CN)
HUANG YONG (CN)
GUO SHUMING (CN)
LI XIA (CN)
GONG CAI (CN)
ZHANG NAN (CN)
LIU XIAOHONG (CN)
HUANG YONG (CN)
GUO SHUMING (CN)
LI XIA (CN)
GONG CAI (CN)
Application Number:
PCT/CN2022/108981
Publication Date:
February 16, 2023
Filing Date:
July 29, 2022
Export Citation:
Assignee:
CSMC TECHNOLOGIES FAB2 CO LTD (CN)
International Classes:
H01L27/112
Foreign References:
| US6580156B1 | 2003-06-17 | |||
| US20060065946A1 | 2006-03-30 | |||
| US20070222027A1 | 2007-09-27 | |||
| CN105097772A | 2015-11-25 | |||
| CN101681879A | 2010-03-24 |
Attorney, Agent or Firm:
J.Z.M.C. PATENT AND TRADEMARK LAW OFFICE (GENERAL PARTNERSHIP) (CN)
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