Title:
POLYIMIDE-BASED HUMIDITY SENSOR AND PREPARATION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2021/114433
Kind Code:
A1
Abstract:
A polyimide-based humidity sensor and a preparation method therefor. The humidity sensor comprises a substrate (1), a first oxide layer (2), a lower electrode (3), a second oxide layer (4), a dielectric layer (5), and an upper electrode (6), wherein the dielectric layer (5) is made of a polyimide nanofiber. The polyimide-based humidity sensor has the characteristics of high in detection precision and small in device size.
Inventors:
WANG CHAO (CN)
FANG HUABIN (CN)
FU BO (CN)
LI XIANGGUANG (CN)
FANG HUABIN (CN)
FU BO (CN)
LI XIANGGUANG (CN)
Application Number:
PCT/CN2019/130231
Publication Date:
June 17, 2021
Filing Date:
December 31, 2019
Export Citation:
Assignee:
WEIFANG GOERTEK MICROELECTRONICS CO LTD (CN)
International Classes:
G01N27/22
Foreign References:
| CN110494744A | 2019-11-22 | |||
| CN103630582A | 2014-03-12 | |||
| CN108414603A | 2018-08-17 | |||
| US20160222539A1 | 2016-08-04 |
Other References:
CHENG LEI, TANG LI-CHENG ，MAO HAI-YANG ，WAMG YAN，WANG LING，HU JIAN-DONG，OU WEN，XIONG JI-JU: "MEMS Humidity Sensor Based on Nano-modified Polyimide", INSTRUMENT TECHNIQUE AND SENSOR, SHENYANG YIQI YIBIAO GONGYI YANJIUSUO, CHINA, no. 1, 15 January 2016 (2016-01-15), China, pages 1 - 3, XP055820590, ISSN: 1002-1841
LI XUEJIA, WANG XIN, WEI QUFU: "Preparation and Characterization of Polyimide Nanofibers by Electrospinning", NEW CHEMICAL MATERIALS, vol. 42, no. 5, 1 May 2014 (2014-05-01), pages 81 - 82+98, XP055820598
LI XUEJIA, WANG XIN, WEI QUFU: "Preparation and Characterization of Polyimide Nanofibers by Electrospinning", NEW CHEMICAL MATERIALS, vol. 42, no. 5, 1 May 2014 (2014-05-01), pages 81 - 82+98, XP055820598
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