Title:
POLYMERS OF VINYLNAPHTHALENE DERIVATIVES, COMPOSITIONS FOR FORMING ANTIREFLECTION COATINGS, AND ANTIREFLECTION COATINGS
Document Type and Number:
WIPO Patent Application WO/2007/046453
Kind Code:
A1
Abstract:
A polymer of a vinylnaphthalene derivative which comprises repeating units represented by the general formula (1) and those represented by the general formula (2) and/or the general formula (3) and has a weight-average molecular weight of 1,000 to 100,000 in terms of polystyrene as determined by GPC and which is to be contained in antireflection coatings capable of inhibiting reflection onto photoresist layers and intermixing in lithography: wherein R1 and R4 are each hydrogen or methyl; R2’s are the same or different and each hydrogen, optionally substituted alkyl having 1 to 6 carbon atoms, or the like; R3 is hydrogen or glycidyl; X is a single bond or methylene; p and q are each an integer of 0 to 7 with the proviso that the sum of p and q is 7; and Y is a monovalent crosslinkable organic group having 1 to 10 carbon atoms.
Inventors:
TANAKA MASATO (JP)
SUGITA HIKARU (JP)
TAKAHASHI JUNICHI (JP)
YOSHIMURA NAKAATSU (JP)
SUGITA HIKARU (JP)
TAKAHASHI JUNICHI (JP)
YOSHIMURA NAKAATSU (JP)
Application Number:
PCT/JP2006/320811
Publication Date:
April 26, 2007
Filing Date:
October 19, 2006
Export Citation:
Assignee:
JSR CORP (JP)
TANAKA MASATO (JP)
SUGITA HIKARU (JP)
TAKAHASHI JUNICHI (JP)
YOSHIMURA NAKAATSU (JP)
TANAKA MASATO (JP)
SUGITA HIKARU (JP)
TAKAHASHI JUNICHI (JP)
YOSHIMURA NAKAATSU (JP)
International Classes:
C08F12/02; C08F12/32; G03F7/11; H01L21/027
Foreign References:
| JP2004168748A | 2004-06-17 | |||
| JP2005241963A | 2005-09-08 | |||
| JP2004264710A | 2004-09-24 | |||
| JP2005015532A | 2005-01-20 | |||
| JP2005179461A | 2005-07-07 |
Attorney, Agent or Firm:
WATANABE, Kazuhira (No.8 Kikuboshi Tower Building 20-18, Asakusabashi 3-chom, Taito-ku Tokyo 53, JP)
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