Title:
POSITION DETECTION AND DETERMINATION APPARATUS, AND CALIBRATION APPARATUS AND METHOD
Document Type and Number:
WIPO Patent Application WO/2021/259220
Kind Code:
A1
Abstract:
A position detection and determination apparatus, and a calibration apparatus and method. The position detection and determination apparatus comprises: a standard locating pin position limiting component (10), for defining standard position information of a silicon wafer bearing box load port locating pin; a locating pin position detection component (20), for detecting realtime position information of the silicon wafer bearing box load port locating pin; and a determination module (30), for obtaining the standard position information and the realtime position information and determining, according to the standard position information and the realtime position information, whether the position of the silicon wafer bearing box load port locating pin is accurate.
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Inventors:
LIU CHIN-KUN (CN)
Application Number:
PCT/CN2021/101377
Publication Date:
December 30, 2021
Filing Date:
June 22, 2021
Export Citation:
Assignee:
CHANGXIN MEMORY TECH INC (CN)
International Classes:
G01B5/00
Foreign References:
| CN210668297U | 2020-06-02 | |||
| CN210570322U | 2020-05-19 | |||
| CN104743160A | 2015-07-01 | |||
| CN102338605A | 2012-02-01 | |||
| CN209310669U | 2019-08-27 | |||
| JPS59163501A | 1984-09-14 |
Attorney, Agent or Firm:
ADVANCE CHINA IP LAW OFFICE (CN)
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