Title:
POSITION-MEASURING DEVICE, POSITION-MEASURING SYSTEM, AND MEASURING DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/259538
Kind Code:
A1
Abstract:
This position-measuring device comprises: a mobile device that is capable of movement; a position-measuring unit including an irradiation unit that irradiates a measuring light onto a reflecting element arranged on a movable part of a robot, a light-receiving unit that receives reflected light from the reflecting element, a position information acquisition unit that acquires position information of the reflecting element, and a moving part that changes an irradiation direction of the measuring light; an imaging unit; and a transmission unit that transmits the position information acquired by the position information acquisition unit, or adjustment information of the robot based on the position information, to a control system of the robot. The mobile device causes at least one of the irradiation unit, the light-receiving unit, and the imaging unit to move, uses the imaging unit to capture an image of either one or both of the reflecting element and at least part of the robot, and on the basis of the captured image result of the imaging unit, controls the moving part such that the measuring light is irradiated onto the reflecting element.
Inventors:
SATO SHINJI (JP)
Application Number:
PCT/JP2021/022365
Publication Date:
December 15, 2022
Filing Date:
June 11, 2021
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
G05D1/02; G01C15/00
Domestic Patent References:
| WO2007002319A1 | 2007-01-04 |
Foreign References:
| JP2018515774A | 2018-06-14 | |||
| JP2010237169A | 2010-10-21 | |||
| JP2010520075A | 2010-06-10 | |||
| JP2015514982A | 2015-05-21 | |||
| JP2001025985A | 2001-01-30 |
Attorney, Agent or Firm:
NISHIZAWA Kazuyoshi et al. (JP)
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