POSITIONING CONTROL DEVICE AND POSITIONING CONTROL METHOD

Title:

POSITIONING CONTROL DEVICE AND POSITIONING CONTROL METHOD

Document Type and Number:

WIPO Patent Application WO/2002/063623

Kind Code:

A1

Abstract:

A positioning control device and method in which the relative position error in position follow-up is reduced by using the periodicity of position fluctuation. The positioning control device comprises a position sensor for measuring the error of relative positions of the desired position of an objective member and a moving member, an adder for adding the position error signal outputted from the position sensor and a delay signal, a signal delay means for outputting a delay signal delayed by the period of the position fluctuation of the objective member upon receiving the output of the adder, a drive means for moving a moving member, and a means for inputting the signal of the sum of the position error signal and the delay signal to the drive means and addition-inputting the delay signal through a filter having a predetermined frequency characteristic in a specific frequency range to the drive means.

Inventors:

KUBOTA MASASHI (JP)
SHIMONOU SIGERU (JP)
IWASAWA NAOTOSHI (JP)

Application Number:

PCT/JP2002/000923

Publication Date:

August 15, 2002

Filing Date:

February 05, 2002

Export Citation:

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Assignee:

NEC CORP (JP)
KUBOTA MASASHI (JP)
SHIMONOU SIGERU (JP)
IWASAWA NAOTOSHI (JP)

International Classes:

G11B21/10; G05D3/12; G11B5/596; G11B7/095; G11B7/00; (IPC1-7): G11B21/10; G11B7/095; G05D3/12

Foreign References:

JPS6310384A	1988-01-16
JPS59223977A	1984-12-15
JP2001126421A	2001-05-11

Other References: