Title:
POSITIONING TABLE
Document Type and Number:
WIPO Patent Application WO/1987/000968
Kind Code:
A1
Abstract:
A positioning table comprises: a single-bed table (11) supported so as to be rotatable and linearly movable within a plane; and feed means (18, 23, 28) for three axes, different in direction from each other, which are reciprocatable along their respective straight lines. The positioning table has a low overall height, is very rigid, and is capable of providing accurate positioning as well as a rotation about any desired position on a movable table.
Inventors:
OKU KENICHI (JP)
SUZUKI MASAKI (JP)
SUZUKI MASAKI (JP)
Application Number:
PCT/JP1983/000363
Publication Date:
February 12, 1987
Filing Date:
October 19, 1983
Export Citation:
Assignee:
OKU KENICHI (JP)
SUZUKI MASAKI (JP)
SUZUKI MASAKI (JP)
International Classes:
B23Q1/48; G01B21/00; G03F9/00; G05D3/00; G12B5/00; H01L21/30; H01L21/027; H01L21/68; (IPC1-7): H01L21/30; B23Q15/00; G03F9/00; G05D3/00; H01L21/68
Foreign References:
| JPS5399875A | 1978-08-31 | |||
| JPS4864884A | 1973-09-07 |
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