Title:
POWDER PROTECTING THREE-WAY VALVE
Document Type and Number:
WIPO Patent Application WO/2019/103298
Kind Code:
A1
Abstract:
The present invention relates to a powder protecting three-way valve for an apparatus for manufacturing a semiconductor or a flat panel display, and the valve supplies, in an air curtain form, nitrogen gas heated in an exhaust line of equipment for manufacturing a semiconductor and a flat panel display so as to prevent powder from penetrating between a rotary ball and a ball seat, and thus can be used for a long time without damage, and does not require a separate mounting space since a member for heating and supplying the nitrogen gas is compactly provided in an integrated form instead of being provided as a separate independent object.
Inventors:
LEE JEONG CHEOL (KR)
Application Number:
PCT/KR2018/011041
Publication Date:
May 31, 2019
Filing Date:
September 19, 2018
Export Citation:
Assignee:
BOYA CO LTD (KR)
International Classes:
H01L21/67; F16K11/087; F16K27/06
Foreign References:
| KR100324808B1 | 2002-02-20 | |||
| US20100327196A1 | 2010-12-30 | |||
| KR0174086B1 | 1999-04-01 | |||
| KR20110043818A | 2011-04-28 | |||
| KR20110016011A | 2011-02-17 |
Attorney, Agent or Firm:
OH, Wihwan (KR)
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