Title:
POWER ASSISTED AUTOMATIC SUPERVISED CLASSIFIER CREATION TOOL FOR SEMICONDUCTOR DEFECTS
Document Type and Number:
WIPO Patent Application WO2001040145
Kind Code:
A3
Abstract:
A method and system that optionally allows a user to view image defects organized by natural groupings based on features of the images. The natural groupings make it easier for the user to organize some or all of the images into classes in a training set of images. A feature vector is extracted from each image in the training set and stored, along with its user-specified class, for use by an automatic classifier software module. The automatic classifier uses the stored feature vectors and classes to automatically classify images not in the training set. If the automatically classified images do not match images manually classified by the user, the user modifies the training set until a better result is obtained from the automatic classifier. The system can provide feedback to an inspection system designed to aid in the setup and fine-tuning of the inspection system.
Inventors:
BAKKER DAVID
BANERJEE SAIBAL
SMITH IAN
BANERJEE SAIBAL
SMITH IAN
Application Number:
PCT/US2000/032635
Publication Date:
July 11, 2002
Filing Date:
November 29, 2000
Export Citation:
Assignee:
KLA TENCOR CORP (US)
International Classes:
G06T5/00; H01L21/66; (IPC1-7): C06T7/00
Foreign References:
| FR2681947A1 | 1993-04-02 |
Other References:
See also references of EP 1238367A2
Download PDF:
Previous Patent: IGNITION MEANS FOR PROPELLANT POWDERS
Next Patent: CATALYSIS USING PHOSPHINE OXIDE COMPOUNDS
Next Patent: CATALYSIS USING PHOSPHINE OXIDE COMPOUNDS