Title:
PRECISE CALIBRATION APPARATUS AND METHOD FOR MAGNETORHEOLOGICAL POLISHING DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/016721
Kind Code:
A1
Abstract:
Provided are a precise calibration apparatus and method for a magnetorheological polishing device. The magnetorheological polishing device comprises a polishing wheel (3) and a support (7) which is used to install the polishing wheel (3). The precise calibration apparatus comprises: an arc-shaped bracket (5), a sensor (4), a signal acquisition circuit (8), an industrial control upper computer (9) and a motion control circuit (10); the apparatus can implement an automated rapid calibration process, ensuring that the polishing clearance stays within a permitted error range when the magnetorheological polishing device processes the surfaces of various optical elements (2), so as to effectively control a removal function, reduce or eliminate low-frequency and middle-frequency errors introduced by the insufficient trajectory precision of a mechanic arm (1) within a profile residual error after processing, thus increasing the process precision of the mechanic arm (1)-based magnetorheological polishing device.
Inventors:
ZHANG XUEJUN (CN)
LI LONGXIANG (CN)
XUE DONGLIN (CN)
LI XINGCHANG (CN)
LI LONGXIANG (CN)
XUE DONGLIN (CN)
LI XINGCHANG (CN)
Application Number:
PCT/CN2020/123912
Publication Date:
January 27, 2022
Filing Date:
October 27, 2020
Export Citation:
Assignee:
CHANGCHUN INST OPTICS FINE MECH & PHYSICS CAS (CN)
International Classes:
B24B49/00
Foreign References:
| CN111805427A | 2020-10-23 | |||
| CN109605134A | 2019-04-12 | |||
| CN108255129A | 2018-07-06 | |||
| CN108088388A | 2018-05-29 | |||
| CN110877255A | 2020-03-13 | |||
| CN101644915A | 2010-02-10 | |||
| CN106826402A | 2017-06-13 | |||
| JP2010230485A | 2010-10-14 | |||
| CN103143984A | 2013-06-12 | |||
| CN202010704882A | 2020-07-21 |
Other References:
See also references of EP 4186638A4
Attorney, Agent or Firm:
CC INTELLECTUAL PROPERTY LAW FIRM (CN)
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