Title:
PRECISION OPTICAL DEVICE IMAGING METHOD FOR OBSERVING SAMPLE CELL
Document Type and Number:
WIPO Patent Application WO/2021/118151
Kind Code:
A1
Abstract:
According to one embodiment of the present invention, the position of a sample cell can be precisely detected, and an error map is created between a low magnification image and a high magnification image of the sample cell to be imaged by a precision optical device, and thus position accuracy can be increased. To this end, a precision optical device imaging method in one embodiment of the present invention particularly comprises: a low magnification correction chart setting step (S1000) in which a position control unit performs position control on a correction chart on which a mark is displayed, so as to set same in a low magnification imaging unit; a first low magnification imaging step (S1100) in which a low magnification imaging unit images the correction chart at a low magnification rate; a reference mark detecting step (S1200) in which an image detecting unit detects a mark from the low magnification photographing image of the imaged correction chart and outputs first coordinate information about the detected mark; a high magnification correction chart setting step (S1300) in which the position control unit sets a correction chart in a high magnification imaging unit on the basis of the first coordinate information; a first high magnification imaging step (S1400) in which a high magnification imaging unit images the correction chart at a high magnification rate; a source mark detecting step (S1500) in which the image detecting unit detects a mark from the high magnification photographing image of the imaged correction chart and outputs second coordinate information about the detected mark; and an error value calculation step (S1600) in which an error calculation unit calculates a position error value on the basis of the first coordinate information and the second coordinate information.
Inventors:
CHOI JONG HO (KR)
LEE YOUNG DEUK (KR)
LEE YOUNG DEUK (KR)
Application Number:
PCT/KR2020/017433
Publication Date:
June 17, 2021
Filing Date:
December 02, 2020
Export Citation:
Assignee:
UIMD INC (KR)
International Classes:
G02B21/36
Foreign References:
| KR20040032361A | 2004-04-17 | |||
| KR20170032175A | 2017-03-22 | |||
| KR20170040571A | 2017-04-13 | |||
| US20040136581A1 | 2004-07-15 | |||
| JP2004343222A | 2004-12-02 |
Attorney, Agent or Firm:
SHIN, Sungki (KR)
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