PRECURSOR SUPPLY SYSTEM AND PRECURSOR SUPPLY METHOD

Title:

PRECURSOR SUPPLY SYSTEM AND PRECURSOR SUPPLY METHOD

Document Type and Number:

WIPO Patent Application WO/2017/187866

Kind Code:

A1

Abstract:

Provided is a supply system capable of supplying a solid material precursor or a liquid material precursor to a later process at a specified concentration or higher but not a concentration that is greater than necessary. The supply system 1 comprises: a vessel 11 for storing a precursor material; a vessel-heating unit for heating the vessel at a set temperature; a carrier gas-heating unit that is disposed in an introduction line L1 and is for heating a carrier gas; a main measurement unit that is disposed in a discharge line L2 and is for obtaining data relating to the precursor gas; and a carrier gas temperature-controlling section for controlling the temperature of the carrier gas-heating unit on the basis of the measurement results of the main measurement unit.

Inventors:

NAKAGAWA TOSHIYUKI (JP)
MORIMOTO KOUKI (JP)
YANAGITA KAZUTAKA (JP)
KAMEOKA TAKASHI (JP)
KUMAMOTO YUKI (JP)
SUZUKI KAZUMA (JP)
GOTO MIKIO (JP)

Application Number:

PCT/JP2017/012564

Publication Date:

November 02, 2017

Filing Date:

March 28, 2017

Export Citation:

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Assignee:

AIR LIQUIDE (FR)
AIR LIQUIDE JAPAN LTD (JP)

International Classes:

C23C16/448; B01J4/02; C23C16/52; F17C7/02; H01L21/205

Foreign References:

JP2015519478A	2015-07-09
JP2013249511A	2013-12-12
JP2003527481A	2003-09-16
JP2000513110A	2000-10-03
JP2000080477A	2000-03-21
JP2004323894A	2004-11-18
JP2008538158A	2008-10-09

Other References: