Title:
PRECURSORS FOR METALORGANIC CHEMICAL VAPOUR DEPOSITION
Document Type and Number:
WIPO Patent Application WO/2003/014134
Kind Code:
A1
Abstract:
Metal compounds having a $g(b) -diketonate group containing an aryl group or a substituted derivative thereof as at least one ligand thereof and their use in chemical vapour deposition techniques.
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Inventors:
ANTHONY COPELAND JONES (GB)
Application Number:
PCT/GB2002/003657
Publication Date:
February 20, 2003
Filing Date:
August 07, 2002
Export Citation:
Assignee:
INORGTECH LTD (GB)
ANTHONY COPELAND JONES (GB)
ANTHONY COPELAND JONES (GB)
International Classes:
C07F7/00; C07F9/00; (IPC1-7): C07F19/00; C07F7/00; C07F9/00; C23C16/00
Domestic Patent References:
| WO1984003042A1 | 1984-08-16 | |||
| WO2000069863A1 | 2000-11-23 |
Foreign References:
| US3153000A | 1964-10-13 | |||
| US6099903A | 2000-08-08 |
Other References:
KAPOOR, R. N. ET AL: "Organic compounds of niobium and tantalum. Reactions of niobium and tantalum pentaethoxides with dibenzoylmethane", BULL. CHEM. SOC. JPN. (1967), 40(6), 1384-6, 1967, XP002219905
DATABASE CA [online] CHEMICAL ABSTRACTS SERVICE, COLUMBUS, OHIO, US; STARY, J. ET AL: "Systematic study of the solvent extraction of metal.beta.-diketonates", XP002219906, retrieved from STN Database accession no. 58:76615
DATABASE CA [online] CHEMICAL ABSTRACTS SERVICE, COLUMBUS, OHIO, US; TROYANOV, S. I. ET AL: "Packing in crystal structures of metal.beta.-diketonates used in MOCVD and its correlation to volatility", XP002219907, retrieved from STN Database accession no. 128:264125
DATABASE CA [online] CHEMICAL ABSTRACTS SERVICE, COLUMBUS, OHIO, US; LIM, JONG TAE ET AL: "Study on the development of CVD precursors. II. Synthesis and properties of new lanthanum.beta.-diketonates", XP002219908, retrieved from STN Database accession no. 126:69303
DATABASE CA [online] CHEMICAL ABSTRACTS SERVICE, COLUMBUS, OHIO, US; WILLIAMS, PAUL A. ET AL: "The unusual thermal stabilization of MOCVD precursors by the dibenzoyl methanate group: liquid injection MOCVD of tantalum oxide and niobium oxide using M(OEt)4(dbm) precursors", XP002219909, retrieved from STN Database accession no. 137:145913 CA
DATABASE CA [online] CHEMICAL ABSTRACTS SERVICE, COLUMBUS, OHIO, US; STARY, J. ET AL: "Systematic study of the solvent extraction of metal.beta.-diketonates", XP002219906, retrieved from STN Database accession no. 58:76615
DATABASE CA [online] CHEMICAL ABSTRACTS SERVICE, COLUMBUS, OHIO, US; TROYANOV, S. I. ET AL: "Packing in crystal structures of metal.beta.-diketonates used in MOCVD and its correlation to volatility", XP002219907, retrieved from STN Database accession no. 128:264125
DATABASE CA [online] CHEMICAL ABSTRACTS SERVICE, COLUMBUS, OHIO, US; LIM, JONG TAE ET AL: "Study on the development of CVD precursors. II. Synthesis and properties of new lanthanum.beta.-diketonates", XP002219908, retrieved from STN Database accession no. 126:69303
DATABASE CA [online] CHEMICAL ABSTRACTS SERVICE, COLUMBUS, OHIO, US; WILLIAMS, PAUL A. ET AL: "The unusual thermal stabilization of MOCVD precursors by the dibenzoyl methanate group: liquid injection MOCVD of tantalum oxide and niobium oxide using M(OEt)4(dbm) precursors", XP002219909, retrieved from STN Database accession no. 137:145913 CA
Attorney, Agent or Firm:
Roystons (Tower Building Water Street Merseyside
Liverpool L3 1BA, GB)
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