Title:
PREPARATION METHOD FOR A BRIDGING TYPE MICRO-NANO STRUCTURE SENSING UNIT ARRAY SENSOR AND PRODUCT
Document Type and Number:
WIPO Patent Application WO/2021/082526
Kind Code:
A1
Abstract:
A bridging type micro-nano structure sensing unit array sensor and a preparation method therefor. The method comprises: preparing, on the surface of a substrate (1), multiple pairs of electrode arrays (4) to be bridged of specified shapes, and preparing a seed layer (6) of a specified shape and thicknesses; next, preparing a passivation protective layer (7) on the outer peripheral surface of the seed layer (6) except for a bridging surface, and performing heat treatment on the seed layer (6) to improve the crystallinity of the seed layer (6); and finally, directionally growing a micro-nano structure (8) using the solution method to achieve the bridging of the multiple pairs of electrode arrays (4). The array sensor comprises a substrate (1), electrode arrays (4), a seed layer (6), a passivation protective layer (7), and a micro-nano structure (8), the micro-nano structure (8) being grown on the side of the seed layer (6) that is not covered by the passivation protective layer (7) so as to achieve the bridging of the pairs of electrode arrays (4). The sensor has the characteristics of high sensitivity and strong fault tolerance, so that the junction resistance between sensitive layers of the traditional bridged micro-nano structure sensors is greatly lowered.
Inventors:
SHI TIELIN (CN)
LIN JIANBIN (CN)
LIAO GUANGLAN (CN)
FANG HAN (CN)
HAN HANGDI (CN)
LIN JIANBIN (CN)
LIAO GUANGLAN (CN)
FANG HAN (CN)
HAN HANGDI (CN)
Application Number:
PCT/CN2020/101360
Publication Date:
May 06, 2021
Filing Date:
July 10, 2020
Export Citation:
Assignee:
UNIV HUAZHONG SCIENCE TECH (CN)
International Classes:
G01N27/30
Foreign References:
| CN110702753A | 2020-01-17 | |||
| CN103966662A | 2014-08-06 | |||
| CN103628133A | 2014-03-12 | |||
| CN106409975A | 2017-02-15 | |||
| CN102730630A | 2012-10-17 | |||
| US20080239610A1 | 2008-10-02 |
Other References:
LIU NISHUANG: "Optoelectronic Devices Based on Lateral Grown Zinc Oxide Nanorods", INFORMATION & TECHNOLOGY, CHINA DOCTORAL DISSERTATIONS FULL-TEXT DATABASE, 26 October 2011 (2011-10-26), XP055809413
Attorney, Agent or Firm:
HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY PATENT AGENCY CENTER (CN)
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