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Title:
PRESSURE SENSOR UNIT, AND MULTI-DIMENSIONAL PRESSURE SENSOR AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2022/116237
Kind Code:
A1
Abstract:
A pressure sensor unit (100), and a multi-dimensional pressure sensor (300) and a manufacturing method therefor. The pressure sensor unit (100) comprises: a bottom electrode (110); a bottom electrode lead (112) electrically connected to the bottom electrode (110); a piezoelectric material layer (114); a top electrode (116); and a top electrode lead (118) electrically connected to the top electrode (116), wherein the bottom electrode (110), the piezoelectric material layer (114), and the top electrode (116) are sequentially stacked in a direction of a sensitive axis of the piezoelectric material layer (114) to sense the pressure in the direction of the sensitive axis, one of the bottom electrode lead (112) and the top electrode lead (118) comprises a resistor segment (120) and a lead segment (122), and the resistor segment (120) serves as a resistive sensor for sensing the pressure in the length direction of the resistor segment (120).

Inventors:
YANG RUIFENG (CN)
TSANG WEI MONG (CN)
JIAO WENLONG (CN)
WANG MIAO (CN)
LI SIHAN (CN)
Application Number:
PCT/CN2020/134820
Publication Date:
June 09, 2022
Filing Date:
December 09, 2020
Export Citation:
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Assignee:
UNITED MICROELECTRONICS CENTER CO LTD (CN)
International Classes:
H01L41/113; G01L1/20; G01L9/06; H01L27/20; H01L41/047; H01L41/22; H01L41/29
Foreign References:
CN111006801A2020-04-14
CN101256100A2008-09-03
CN108871629A2018-11-23
CN101834268A2010-09-15
CN102692294A2012-09-26
JP2008192672A2008-08-21
JPH09126922A1997-05-16
Attorney, Agent or Firm:
BEIJING HAN KUN LAW OFFICES (CN)
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