Title:
PRESSURE SENSOR
Document Type and Number:
WIPO Patent Application WO/2014/059833
Kind Code:
A1
Abstract:
A pressure sensor, comprising: a silicon cup (20), a voltage dependent resistor (30), an insulation layer (40) and a metal film (50). The silicon cup (20) comprises a pressure-sensing film (202) located on the upper part of the silicon cup (20) and a bracket (201) located at the side edge of the silicon cup (20). The voltage dependent resistor (30) is located within the boundary of the pressure-sensing film (202) of the silicon cup (20). The insulation layer (40) covers the upper surface of the silicon cup (20). The metal film (50) is located above the pressure-sensing film (202). Using the characteristic of thermal expansion and cold contraction of metal, the metal film (50) is placed above the pressure-sensing film (202), when the metal film (50) becomes elongated while temperature rises, the pressure-sensing film (202) on the silicon cup (20) is forced to generate larger deformation so as to offset or reduce the defect that an output signal of the sensor is reduced because of the rise of the usage temperature.
Inventors:
ZHANG XINWEI (CN)
XIA CHANGFENG (CN)
LI XIANG (CN)
SU WEI (CN)
XIA CHANGFENG (CN)
LI XIANG (CN)
SU WEI (CN)
Application Number:
PCT/CN2013/082640
Publication Date:
April 24, 2014
Filing Date:
August 30, 2013
Export Citation:
Assignee:
CSMC TECHNOLOGIES FAB1 CO LTD (CN)
International Classes:
G01L1/18; G01L9/06
Foreign References:
| DD259040A1 | 1988-08-10 | |||
| CN101639391A | 2010-02-03 | |||
| CN101450786A | 2009-06-10 | |||
| CN101298999A | 2008-11-05 | |||
| CN1334919A | 2002-02-06 | |||
| CN102197293A | 2011-09-21 | |||
| US20090139338A1 | 2009-06-04 | |||
| US6487898B1 | 2002-12-03 | |||
| JP2003057137A | 2003-02-26 | |||
| CN101776501A | 2010-07-14 |
Other References:
YAN, YING: "Research on several key techniques of MEMS high temperature pressure transducers.", ELECTRONIC TECHNOLOGY & INFORMATION SCIENCE, CHINESE SELECTED DOCTORAL DISSERTATIONS AND MASTER'S THESES FULL-TEXT DATABASES (MASTER), 15 May 2006 (2006-05-15), pages 32 - 34
Attorney, Agent or Firm:
ADVANCE CHINA I.P.LAW OFFICE (CN)
广州华进联合专利商标代理有限公司 (CN)
广州华进联合专利商标代理有限公司 (CN)
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