Title:
PRESSURE SENSOR
Document Type and Number:
WIPO Patent Application WO/2021/166853
Kind Code:
A1
Abstract:
[Problem] To provide a pressure sensor that has a plurality of detection parts in a lamination direction, and moreover has improved detection accuracy. [Solution] A pressure sensor 10 has a membrane 22 in which deformation corresponding to pressure occurs, a first gauge layer 40 which is formed on the membrane 22, an intermediate insulation layer 50 which is formed on the first gauge layer 40, and a second gauge layer 60 which is formed on the intermediate insulation layer 50. The first gauge layer 40 and the second gauge layer 60 respectively include a first detection part 42 and a second detection part 62 which detect the deformation of the membrane. The distance from the surface of the membrane 22 to the second detection part 62 is no more than 30 µm.
Inventors:
KOBAYASHI MASANORI (JP)
UNNO KEN (JP)
SASAHARA TETSUYA (JP)
NAWAOKA KOHEI (JP)
UNNO KEN (JP)
SASAHARA TETSUYA (JP)
NAWAOKA KOHEI (JP)
Application Number:
PCT/JP2021/005556
Publication Date:
August 26, 2021
Filing Date:
February 15, 2021
Export Citation:
Assignee:
TDK CORP (JP)
International Classes:
G01L9/04
Foreign References:
| JP2007516746A | 2007-06-28 | |||
| JP2018040726A | 2018-03-15 |
Other References:
See also references of EP 4109065A4
Attorney, Agent or Firm:
MAEDA & SUZUKI (JP)
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