Title:
PROBE CARD FOR HIGH-TEMPERATURE HIGH-VOLTAGE TEST OF POWER DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/002196
Kind Code:
A1
Abstract:
A probe card for a high-temperature high-voltage test of a power device, relating to the technical field of semiconductor device tests. The probe card is sequentially provided with an air inlet system (1), a PCB (2), a transfer layer (3), a guide plate (4), and a probe (5) from top to bottom; a plurality of lower air outlets (1-1) and side air outlets (1-2) are formed at the bottom of the air inlet system (1); first through holes (2-1) having the same position, shape and number as the lower air outlet holes (1-1) are distributed on the PCB (2); second through holes (3-1) having the same position, shape and number as the lower air outlet holes (1-1) are distributed on the transfer layer (3); third through holes (4-1) having the same position, shape and number as the lower air outlet holes (1-1) are distributed on the guide plate (4); the lower air outlet holes (1-1), the first through holes (2-1), the second through holes (3-1), and the third through holes (4-1) are coaxially arranged; high-temperature high-pressure gas jetted from the lower air outlet holes (1-1) sequentially passes through the first through holes (2-1), the second through holes (3-1), and the third through holes (4-1) and then is blown between the guide plate (4) and a tested wafer (6). According to the present invention, abnormal discharge between the probes (5) in a high-voltage environment and buckling deformation of the probe card and position drift of the probe (5) in a high-temperature environment can be suppressed at the same time.
Inventors:
ZHAO LIANGYU (CN)
WANG AILIN (CN)
WANG XINGGANG (CN)
ZHOU MING (CN)
WANG AILIN (CN)
WANG XINGGANG (CN)
ZHOU MING (CN)
Application Number:
PCT/CN2021/103983
Publication Date:
January 06, 2022
Filing Date:
July 01, 2021
Export Citation:
Assignee:
MAXONE SEMICONDUCTOR CO LTD (CN)
International Classes:
G01R1/067; G01R1/073; G01R31/26; G01R35/00
Foreign References:
| CN111624374A | 2020-09-04 | |||
| CN111624373A | 2020-09-04 | |||
| CN107305218A | 2017-10-31 | |||
| CN102103153A | 2011-06-22 | |||
| CN210376447U | 2020-04-21 | |||
| CN209707128U | 2019-11-29 | |||
| JP2004264168A | 2004-09-24 |
Attorney, Agent or Firm:
SUZHOU CREATOR PATENT AND TRADEMARK AGENCY, LTD. (CN)
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