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Title:
PROBE CARD
Document Type and Number:
WIPO Patent Application WO/2004/040321
Kind Code:
A1
Abstract:
A probe card being connected electrically with an electronic device, comprising probe pins being connected electrically with the electronic device, a substrate for holding the probe pins, and a section for varying the temperature on the back surface of a surface opposing the electronic device in the direction approaching the temperature on the opposing surface. The probe pin is connected electrically with the electronic device at the other end opposing one end held on the holding substrate and the direction of the probe pin from one end toward the other end may be substantially parallel with the direction from the holding substrate toward the electronic device.

Inventors:
KOJIMA AKIO (JP)
KUITANI TETSUYA (JP)
SAITO TADAO (JP)
Application Number:
PCT/JP2003/013164
Publication Date:
May 13, 2004
Filing Date:
October 15, 2003
Export Citation:
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Assignee:
ADVANTEST CORP (JP)
KOJIMA AKIO (JP)
KUITANI TETSUYA (JP)
SAITO TADAO (JP)
International Classes:
G01R31/26; G01R1/06; G01R1/073; H01L21/66; (IPC1-7): G01R1/073; G01R31/28
Foreign References:
JPH04359445A1992-12-11
JPH0653294A1994-02-25
JPH0685020A1994-03-25
JPH01278739A1989-11-09
JP2001210683A2001-08-03
JPH02192749A1990-07-30
JPH06349909A1994-12-22
JPH1126523A1999-01-29
JP2001228171A2001-08-24
Attorney, Agent or Firm:
Ryuka, Akihiro (24-12 Shinjuku 1-chom, Shinjuku-ku Tokyo, JP)
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