Title:
PROBE DEVICE, PROBE CARD CHANNEL INFORMATION CREATION PROGRAM, AND PROBE CARD CHANNEL INFORMATION CREATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2004/010491
Kind Code:
A1
Abstract:
A plurality of channel areas corresponding to respective channels (14’) (a group of probes) of a probe card (3) are arranged in a matrix and displayed on a display section (45). Among these, a plurality of channel areas corresponding to the probe card channel layout are specified by a pointing device (301). Each of the channel areas is successively specified by the pointing device and added by an identification number. Channel information is created for relating the channel layout information to the identification numbers. The channel information has a data structure where channel relative coordinates are arranged in the order of the identification numbers. The probe device prepares a common program for inspecting various types of probe cards and performs inspection by using the channel information.
Inventors:
FUKASAWA YUKIHIKO (JP)
ABE HIRONOBU (JP)
ABE HIRONOBU (JP)
Application Number:
PCT/JP2003/009264
Publication Date:
January 29, 2004
Filing Date:
July 22, 2003
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
FUKASAWA YUKIHIKO (JP)
ABE HIRONOBU (JP)
FUKASAWA YUKIHIKO (JP)
ABE HIRONOBU (JP)
International Classes:
G01R1/06; G01R1/073; G01R31/28; G01R31/319; H01L21/66; G01R35/00; (IPC1-7): H01L21/66
Foreign References:
| US5585737A | 1996-12-17 | |||
| JPH07321167A | 1995-12-08 |
Attorney, Agent or Firm:
Suzuye, Takehiko c/o SUZUYE & SUZUYE (7-2 Kasumigaseki 3-chom, Chiyoda-ku Tokyo, JP)
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