Title:
PROBE FOR ENERGIZATION TEST
Document Type and Number:
WIPO Patent Application WO/2007/017955
Kind Code:
A1
Abstract:
A probe, comprising a plate-like main body part having a base end fitted to a support
base plate and a tip on the opposite side of the base end and manufactured of a tough
material and a needle tip part disposed at the tip of the main body part and having
a needle tip brought into contact with the electrode of a tested body. The main
body part comprises conductive materials extending from the base end to the tip
and at least partly buried in the tough material. The tough material comprises
a toughness higher than that of the conductive materials, and the conductive
materials comprise a conductivity higher than that of the tough material. Thus,
the disturbance of signals provided through the probe can be reduced without
impairing the elastic deformation of the probe.
Inventors:
HIRAKAWA HIDEKI (JP)
SOMA AKIRA (JP)
HAYASHIZAKI TAKAYUKI (JP)
KUNIYOSHI SHINJI (JP)
TAZAWA MASAHISA (JP)
SOMA AKIRA (JP)
HAYASHIZAKI TAKAYUKI (JP)
KUNIYOSHI SHINJI (JP)
TAZAWA MASAHISA (JP)
Application Number:
PCT/JP2005/014871
Publication Date:
February 15, 2007
Filing Date:
August 09, 2005
Export Citation:
Assignee:
NIHON MICRONICS KK (JP)
HIRAKAWA HIDEKI (JP)
SOMA AKIRA (JP)
HAYASHIZAKI TAKAYUKI (JP)
KUNIYOSHI SHINJI (JP)
TAZAWA MASAHISA (JP)
HIRAKAWA HIDEKI (JP)
SOMA AKIRA (JP)
HAYASHIZAKI TAKAYUKI (JP)
KUNIYOSHI SHINJI (JP)
TAZAWA MASAHISA (JP)
International Classes:
G01R1/073
Foreign References:
JP2004340617A | 2004-12-02 | |||
JP2001337110A | 2001-12-07 | |||
JP2004150874A | 2004-05-27 | |||
JP2000111577A | 2000-04-21 | |||
JPH11162270A | 1999-06-18 | |||
JP2000338131A | 2000-12-08 |
Attorney, Agent or Firm:
MATSUNAGA, Nobuyuki et al. (7F 16-4, Toranomon 1-chom, Minato-ku Tokyo 01, JP)
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