Title:
PROBE-HEAD FOR ELECTRICAL DEVICE INSPECTION AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2023/214784
Kind Code:
A1
Abstract:
Disclosed is a probe-head enabling a plurality of devices being inspected to be measured simultaneously. The probe-head, according to the present invention, comprises: an elastic body formed by laminating a plurality of elastic layers; and an electrode part buried inside the elastic body. Through same, shock or a load generated when making contact with a device being inspected is efficiently absorbed, thereby preventing damage to the device being inspected and the probe-head. In addition, according to the present invention, a plurality of electrical devices may be inspected simultaneously, thereby enabling the required inspection time to be reduced. Further, probe pins each have an independent elastic force, and thus inspection stability and reliability may be further increased.
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Inventors:
JANG PIL KUK (KR)
Application Number:
PCT/KR2023/006010
Publication Date:
November 09, 2023
Filing Date:
May 03, 2023
Export Citation:
Assignee:
NANO X CO LTD (KR)
International Classes:
G01R1/073; G01R1/04; G01R3/00
Foreign References:
| KR20210151668A | 2021-12-14 | |||
| KR101689478B1 | 2016-12-23 | |||
| KR100787407B1 | 2007-12-21 | |||
| KR200450813Y1 | 2010-11-03 | |||
| CN101009268A | 2007-08-01 |
Attorney, Agent or Firm:
HANNAM INTELLECTUAL PROPERTY LAW FIRM (KR)
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