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Title:
PROBE HEAD
Document Type and Number:
WIPO Patent Application WO/2023/119897
Kind Code:
A1
Abstract:
Provided is a probe head comprising a probe and an insulating support in which a tapered hole for supporting a plurality of portions of the probe is provided.

Inventors:
SHIMIZU YUSUKE (JP)
SATO KATSUHIKO (JP)
OKUNO TAKAYOSHI (JP)
Application Number:
PCT/JP2022/040970
Publication Date:
June 29, 2023
Filing Date:
November 02, 2022
Export Citation:
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Assignee:
YOKOWO SEISAKUSHO KK (JP)
International Classes:
G01R1/067; G01R31/26
Domestic Patent References:
WO2020202735A12020-10-08
WO2011162362A12011-12-29
WO2015122472A12015-08-20
Foreign References:
JP2006300581A2006-11-02
JP2021092435A2021-06-17
US20100277191A12010-11-04
Attorney, Agent or Firm:
HAYAMI Shinji et al. (JP)
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