Title:
PROBE AND MANUFACTURING METHOD THEREOF
Document Type and Number:
WIPO Patent Application WO/2019/039232
Kind Code:
A1
Abstract:
This probe is provided with a rod-shaped plunger (11) having a tip part (111) and an insertion part (112), and with a tube-shape barrel (12) having an open end into which the insertion part (112) is inserted. The barrel (12) has a pair of slits (121) connected to the open end. At least one pair of junctions (20), opposite each other across the space inside of the barrel (12), is defined in a region near either of the slits (121). The insertion part (112) and the junctions (20) are bonded in the space inside the barrel (12), and the shape of the barrel (12) in the junctions (20) is recessed towards the plunger (11).
Inventors:
NASU MIKA (JP)
OHTSUKA YOSHIHIKO (JP)
FUKATSU NAMIKO (JP)
OHTSUKA YOSHIHIKO (JP)
FUKATSU NAMIKO (JP)
Application Number:
PCT/JP2018/029186
Publication Date:
February 28, 2019
Filing Date:
August 03, 2018
Export Citation:
Assignee:
NIHON MICRONICS KK (JP)
International Classes:
G01R1/067; H01L21/66
Foreign References:
| JP2015141200A | 2015-08-03 | |||
| JP2013053931A | 2013-03-21 | |||
| JP2014211378A | 2014-11-13 | |||
| JP2016080657A | 2016-05-16 |
Attorney, Agent or Firm:
MIYOSHI Hidekazu et al. (JP)
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