Title:
PROBE STORAGE JIG, PROBE STORAGE SYSTEM, AND PROBE STORAGE METHOD
Document Type and Number:
WIPO Patent Application WO/2023/090062
Kind Code:
A1
Abstract:
This probe storage jig stores a probe that includes an arm portion having a cantilever structure and a supporting portion connected to a fixed end of the arm portion. The probe storage jig has a configuration in which a first guide plate and a second guide plate are stacked on one another. A through-hole penetrating through from an upper surface to a lower surface is formed in each of the first guide plate and the second guide plate. The probe storage jig holds the probe, penetrating through the through-holes in each of the first guide plate and the second guide plate, in a state in which an upper portion of the supporting portion is exposed when seen from above the probe storage jig, and a tip end of a free end of the arm portion is exposed when seen from below the probe storage jig. The probe storage jig is configured such that the first guide plate and the second guide plate can move in such a way that the probe is sandwiched between the first guide plate and the second guide plate.
Inventors:
TAKEYA TOSHINAGA (JP)
Application Number:
PCT/JP2022/039498
Publication Date:
May 25, 2023
Filing Date:
October 24, 2022
Export Citation:
Assignee:
NIHON MICRONICS KK (JP)
International Classes:
G01R1/06; G01R1/073; H01L21/66
Foreign References:
| JPS618872U | 1986-01-20 | |||
| KR20110121867A | 2011-11-09 | |||
| JPH04252963A | 1992-09-08 | |||
| JP2005512063A | 2005-04-28 | |||
| JP2010519508A | 2010-06-03 | |||
| US20190265275A1 | 2019-08-29 |
Attorney, Agent or Firm:
MIYOSHI Hidekazu et al. (JP)
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